Matches in SemOpenAlex for { <https://semopenalex.org/work/W1709956767> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1709956767 abstract "The characterization and understanding of the mechanical response of freestanding nano-objects are of prime interest for fundamental research and for supporting reliability analysis of various Micro- and NanoElectroMechanical Systems (MEMS/NEMS). A versatile on-chip mechanical testing platform has been developed using MEMS-based structures in order to explore the mechanical properties of freestanding nano-objects. These structures take advantage of the mismatch stress present in a long silicon nitride beam to apply a deformation to a specimen beam attached to it owing to the release of the underneath sacrificial layer. The connection between the both beams is ensured by an overlap. At the specimen beam ends, dogbone shapes are located to concentrate the loading where the width is uniform. The in-plane dimensions of both, the actuator and the specimen beams, are varied to induce different strains and stress levels. Then, a large range of deformation can be applied to the specimen allowing the extraction of the strain-stress curve as well as the creep/relaxation behavior. Thousands of tests can be performed using a single processed wafer making statistical data analysis possible. The specimen stress and strain are extracted from the measured total displacement of the structure after its release using an analytical model based on beam theory. Recently, in order to improve the accuracy of the stress and strain estimation, additional geometrical and material features contributing to the total displacement of the structure have been implemented into the analytical model. These geometrical features are the specimen dogbones, the overlap between the actuator and specimen, and the under etching of the specimen and actuator fixed parts after the structures release. The presence of a stress gradient in the actuator constitutes an additional feature that must be taken into account. 3D finite elements simulations have been performed to evaluate the improved model precision and to determine what extent these additional features have to be considered or neglected. The technique has been used to study the deformation and fracture of phosphorus-doped polysilicon thin films. Two different film thicknesses have been tested: 240 and 40 nm. The Young’s modulus and the fracture strain have been extracted. For the two film thicknesses, the fracture strain increases with decrease specimen surface area. The thinnest film exhibits the lowest fracture strains. More surprising, post mortem analyses of broken samples reveal a change of fracture mode between the two film thicknesses, from transgranular to intergranular. The fracture strain difference and the fracture mode change observed between the two films thicknesses will be discussed in the light of surface roughness and microstructural characterization using the ACOM-TEM method." @default.
- W1709956767 created "2016-06-24" @default.
- W1709956767 creator A5015819368 @default.
- W1709956767 creator A5023718505 @default.
- W1709956767 creator A5044003817 @default.
- W1709956767 creator A5057810104 @default.
- W1709956767 creator A5075705263 @default.
- W1709956767 date "2013-01-01" @default.
- W1709956767 modified "2023-09-27" @default.
- W1709956767 title "On-chip testing and characterization of polysilicon thin films fracture mechanisms" @default.
- W1709956767 hasPublicationYear "2013" @default.
- W1709956767 type Work @default.
- W1709956767 sameAs 1709956767 @default.
- W1709956767 citedByCount "0" @default.
- W1709956767 crossrefType "journal-article" @default.
- W1709956767 hasAuthorship W1709956767A5015819368 @default.
- W1709956767 hasAuthorship W1709956767A5023718505 @default.
- W1709956767 hasAuthorship W1709956767A5044003817 @default.
- W1709956767 hasAuthorship W1709956767A5057810104 @default.
- W1709956767 hasAuthorship W1709956767A5075705263 @default.
- W1709956767 hasConcept C107551265 @default.
- W1709956767 hasConcept C127413603 @default.
- W1709956767 hasConcept C138885662 @default.
- W1709956767 hasConcept C15083742 @default.
- W1709956767 hasConcept C154945302 @default.
- W1709956767 hasConcept C155672457 @default.
- W1709956767 hasConcept C15744967 @default.
- W1709956767 hasConcept C159985019 @default.
- W1709956767 hasConcept C160671074 @default.
- W1709956767 hasConcept C168834538 @default.
- W1709956767 hasConcept C171250308 @default.
- W1709956767 hasConcept C172707124 @default.
- W1709956767 hasConcept C173409883 @default.
- W1709956767 hasConcept C192562407 @default.
- W1709956767 hasConcept C204366326 @default.
- W1709956767 hasConcept C21036866 @default.
- W1709956767 hasConcept C2777431650 @default.
- W1709956767 hasConcept C2779227376 @default.
- W1709956767 hasConcept C2780841128 @default.
- W1709956767 hasConcept C37977207 @default.
- W1709956767 hasConcept C41008148 @default.
- W1709956767 hasConcept C41895202 @default.
- W1709956767 hasConcept C49040817 @default.
- W1709956767 hasConcept C542102704 @default.
- W1709956767 hasConcept C66938386 @default.
- W1709956767 hasConceptScore W1709956767C107551265 @default.
- W1709956767 hasConceptScore W1709956767C127413603 @default.
- W1709956767 hasConceptScore W1709956767C138885662 @default.
- W1709956767 hasConceptScore W1709956767C15083742 @default.
- W1709956767 hasConceptScore W1709956767C154945302 @default.
- W1709956767 hasConceptScore W1709956767C155672457 @default.
- W1709956767 hasConceptScore W1709956767C15744967 @default.
- W1709956767 hasConceptScore W1709956767C159985019 @default.
- W1709956767 hasConceptScore W1709956767C160671074 @default.
- W1709956767 hasConceptScore W1709956767C168834538 @default.
- W1709956767 hasConceptScore W1709956767C171250308 @default.
- W1709956767 hasConceptScore W1709956767C172707124 @default.
- W1709956767 hasConceptScore W1709956767C173409883 @default.
- W1709956767 hasConceptScore W1709956767C192562407 @default.
- W1709956767 hasConceptScore W1709956767C204366326 @default.
- W1709956767 hasConceptScore W1709956767C21036866 @default.
- W1709956767 hasConceptScore W1709956767C2777431650 @default.
- W1709956767 hasConceptScore W1709956767C2779227376 @default.
- W1709956767 hasConceptScore W1709956767C2780841128 @default.
- W1709956767 hasConceptScore W1709956767C37977207 @default.
- W1709956767 hasConceptScore W1709956767C41008148 @default.
- W1709956767 hasConceptScore W1709956767C41895202 @default.
- W1709956767 hasConceptScore W1709956767C49040817 @default.
- W1709956767 hasConceptScore W1709956767C542102704 @default.
- W1709956767 hasConceptScore W1709956767C66938386 @default.
- W1709956767 hasLocation W17099567671 @default.
- W1709956767 hasOpenAccess W1709956767 @default.
- W1709956767 hasPrimaryLocation W17099567671 @default.
- W1709956767 hasRelatedWork W1849937746 @default.
- W1709956767 hasRelatedWork W1974756020 @default.
- W1709956767 hasRelatedWork W1999003065 @default.
- W1709956767 hasRelatedWork W2024247441 @default.
- W1709956767 hasRelatedWork W2097854732 @default.
- W1709956767 hasRelatedWork W2118602037 @default.
- W1709956767 hasRelatedWork W2126632072 @default.
- W1709956767 hasRelatedWork W2140804926 @default.
- W1709956767 hasRelatedWork W2291234329 @default.
- W1709956767 hasRelatedWork W2328558948 @default.
- W1709956767 hasRelatedWork W2331890498 @default.
- W1709956767 hasRelatedWork W2404359693 @default.
- W1709956767 hasRelatedWork W2613828268 @default.
- W1709956767 hasRelatedWork W2894649368 @default.
- W1709956767 hasRelatedWork W2905811800 @default.
- W1709956767 hasRelatedWork W2951405289 @default.
- W1709956767 hasRelatedWork W2989354130 @default.
- W1709956767 hasRelatedWork W1536931894 @default.
- W1709956767 hasRelatedWork W2474730730 @default.
- W1709956767 hasRelatedWork W2814668601 @default.
- W1709956767 isParatext "false" @default.
- W1709956767 isRetracted "false" @default.
- W1709956767 magId "1709956767" @default.
- W1709956767 workType "article" @default.