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- W1710395562 abstract "This paper presents the design, fabrication and measurement results of a dual-axis electromagnetic scanning micromirror utilizing radial magnetic field. The scanner is comprised of a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, assembled passively above a concentric permanent magnet assembly. Proposed scanner utilizes the radial magnetic field rather than using the magnetic field oriented 45 ° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation[ 1,2]. Forced actuation of the gimbal and resonant actuation of the micromirror provide slow vertical scan and fast horizontal scan respectively. A dual-axis scanner with maximum scan angle of 16.1 °, mirror size of 1.5 mm in diameter, and resonant frequency of 19.7kHz is reported." @default.
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- W1710395562 date "2006-05-25" @default.
- W1710395562 modified "2023-09-23" @default.
- W1710395562 title "Dual-Axis Electromagnetic Scanning Micromirror Using Radial Magnetic Field" @default.
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- W1710395562 doi "https://doi.org/10.1109/memsys.2006.1627729" @default.
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