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- W1728715870 abstract "We give experimental evidence for cobalt in silicon that each of the processes defining phosphorus diffusion gettering (PDG), i.e., (1) P doping by in‐diffusion and (2) SiO2 growth, achieves moderate gettering, while the cooperation of the two processes leads to strong gettering of cobalt. In a tentative model, gettering is attributed to the coupling between local currents of silicon self‐interstitials, which are generated during PDG, and 3d impurities on substitutional sites." @default.
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- W1728715870 date "1990-05-28" @default.
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- W1728715870 title "Model describing phosphorus diffusion gettering of transition elements in silicon" @default.
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- W1728715870 doi "https://doi.org/10.1063/1.102968" @default.
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