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• W1730517786 abstract "In the present paper, a new type of DC arc plasma torch is disclosed. The principles of the new magnetic and fluid dynamic controlled large orifice long discharge tunnel plasma torch is discussed. Two series of DC Plasma Jet diamond film deposition equipment have been developed. The 20 ㎾ Jet equipped with a Φ70 ㎜ orifice torch is capable of depositing diamond films at a growth rate as high as 40 ㎛/h over a substrate area of Φ65 ㎜. The 100 ㎾ high power Jet which is newly developed based on the experience of the low power model is equipped with a Φ120 ㎜ orifice torch, and is capable of depositing diamond films over a substrate area of Φ110 ㎜ at growth rate as high as 40 ㎛/h, and can be operated at gas recycling mode, which allows 95% of the gases be recycled. It is demonstrated that the new type DC plasma torch can be easily scaled up to even higher power Jet. It is estimated that even by the 100 ㎾ Jet, the cost for tool grade diamond films can be as low as less than $4/carat." @default.
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• W1730517786 date "1996-05-01" @default.
• W1730517786 modified "2023-09-26" @default.
• W1730517786 title "100 ㎾ DC Arc Plasma Jet CVD System for Low Cost Large Area Diamond Film Deposition" @default.
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