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- W1738631429 abstract "The electrical conductivity of a Si QD layer was investigated by using secondary ion mass spectrometry (SIMS). The low electrical conductivity was estimated from the charging effect in SIMS depth profiling of a Si QD layer. However, the charging effect of the Si QD layer was disappeared by introduction of poly crystalline Si interlayers, which indicates the improvement of electrical conductivity of the Si QD layer. Copyright © 2014 John Wiley & Sons, Ltd." @default.
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- W1738631429 date "2014-02-05" @default.
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- W1738631429 title "SIMS study on the improvement of electrical conductivity of a Si quantum dot layer by insertion of polycrystalline Si interlayers" @default.
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- W1738631429 doi "https://doi.org/10.1002/sia.5365" @default.
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