Matches in SemOpenAlex for { <https://semopenalex.org/work/W1751450935> ?p ?o ?g. }
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- W1751450935 endingPage "971" @default.
- W1751450935 startingPage "966" @default.
- W1751450935 abstract "Abstract Both in situ microscopy experiments at embedded inlaid copper interconnect structures and numerical simulations based on a physical model provide information about electromigration-induced degradation mechanisms in on-chip interconnects. It is shown that the modification of the bonding strength of the weakest interface results in completely changed degradation and failure mechanisms. Transmission electron microscopy (TEM) images of standard Cu/SiNx interfaces are compared with strengthened interfaces, e. g., after applying an additional metal coating or a self-assembled monolayer (SAM) on top of the polished copper lines. The changed degradation mechanisms as observed with the in situ scanning electron microscopy (SEM) experiment and as predicted based on the numerical simulations are explained based on TEM images." @default.
- W1751450935 created "2016-06-24" @default.
- W1751450935 creator A5015330683 @default.
- W1751450935 creator A5015642735 @default.
- W1751450935 creator A5021627904 @default.
- W1751450935 creator A5024315652 @default.
- W1751450935 creator A5040812337 @default.
- W1751450935 creator A5044596021 @default.
- W1751450935 creator A5061216998 @default.
- W1751450935 creator A5086269274 @default.
- W1751450935 creator A5088019114 @default.
- W1751450935 creator A5088162634 @default.
- W1751450935 date "2005-09-01" @default.
- W1751450935 modified "2023-09-24" @default.
- W1751450935 title "Effect of interface strength on electromigration-induced inlaid copper interconnect degradation: Experiment and simulation" @default.
- W1751450935 cites W1580687113 @default.
- W1751450935 cites W1618396860 @default.
- W1751450935 cites W1995199671 @default.
- W1751450935 cites W1996013151 @default.
- W1751450935 cites W2025975878 @default.
- W1751450935 cites W2034510649 @default.
- W1751450935 cites W2035544436 @default.
- W1751450935 cites W2045383364 @default.
- W1751450935 cites W2048022762 @default.
- W1751450935 cites W2069471268 @default.
- W1751450935 cites W2072857924 @default.
- W1751450935 cites W2101096828 @default.
- W1751450935 cites W2113752379 @default.
- W1751450935 cites W2127715144 @default.
- W1751450935 cites W2154555437 @default.
- W1751450935 cites W2277577461 @default.
- W1751450935 cites W68714869 @default.
- W1751450935 doi "https://doi.org/10.3139/146.101127" @default.
- W1751450935 hasPublicationYear "2005" @default.
- W1751450935 type Work @default.
- W1751450935 sameAs 1751450935 @default.
- W1751450935 citedByCount "12" @default.
- W1751450935 countsByYear W17514509352012 @default.
- W1751450935 countsByYear W17514509352019 @default.
- W1751450935 countsByYear W17514509352020 @default.
- W1751450935 crossrefType "journal-article" @default.
- W1751450935 hasAuthorship W1751450935A5015330683 @default.
- W1751450935 hasAuthorship W1751450935A5015642735 @default.
- W1751450935 hasAuthorship W1751450935A5021627904 @default.
- W1751450935 hasAuthorship W1751450935A5024315652 @default.
- W1751450935 hasAuthorship W1751450935A5040812337 @default.
- W1751450935 hasAuthorship W1751450935A5044596021 @default.
- W1751450935 hasAuthorship W1751450935A5061216998 @default.
- W1751450935 hasAuthorship W1751450935A5086269274 @default.
- W1751450935 hasAuthorship W1751450935A5088019114 @default.
- W1751450935 hasAuthorship W1751450935A5088162634 @default.
- W1751450935 hasConcept C113843644 @default.
- W1751450935 hasConcept C116372231 @default.
- W1751450935 hasConcept C123745756 @default.
- W1751450935 hasConcept C127413603 @default.
- W1751450935 hasConcept C138055206 @default.
- W1751450935 hasConcept C159985019 @default.
- W1751450935 hasConcept C191897082 @default.
- W1751450935 hasConcept C192562407 @default.
- W1751450935 hasConcept C196806460 @default.
- W1751450935 hasConcept C24326235 @default.
- W1751450935 hasConcept C2779679103 @default.
- W1751450935 hasConcept C28413391 @default.
- W1751450935 hasConcept C544778455 @default.
- W1751450935 hasConcept C76155785 @default.
- W1751450935 hasConceptScore W1751450935C113843644 @default.
- W1751450935 hasConceptScore W1751450935C116372231 @default.
- W1751450935 hasConceptScore W1751450935C123745756 @default.
- W1751450935 hasConceptScore W1751450935C127413603 @default.
- W1751450935 hasConceptScore W1751450935C138055206 @default.
- W1751450935 hasConceptScore W1751450935C159985019 @default.
- W1751450935 hasConceptScore W1751450935C191897082 @default.
- W1751450935 hasConceptScore W1751450935C192562407 @default.
- W1751450935 hasConceptScore W1751450935C196806460 @default.
- W1751450935 hasConceptScore W1751450935C24326235 @default.
- W1751450935 hasConceptScore W1751450935C2779679103 @default.
- W1751450935 hasConceptScore W1751450935C28413391 @default.
- W1751450935 hasConceptScore W1751450935C544778455 @default.
- W1751450935 hasConceptScore W1751450935C76155785 @default.
- W1751450935 hasIssue "9" @default.
- W1751450935 hasLocation W17514509351 @default.
- W1751450935 hasOpenAccess W1751450935 @default.
- W1751450935 hasPrimaryLocation W17514509351 @default.
- W1751450935 hasRelatedWork W1846200327 @default.
- W1751450935 hasRelatedWork W1972820050 @default.
- W1751450935 hasRelatedWork W2001621343 @default.
- W1751450935 hasRelatedWork W2020280534 @default.
- W1751450935 hasRelatedWork W2056271859 @default.
- W1751450935 hasRelatedWork W2111207508 @default.
- W1751450935 hasRelatedWork W2127133906 @default.
- W1751450935 hasRelatedWork W2172277529 @default.
- W1751450935 hasRelatedWork W2319811447 @default.
- W1751450935 hasRelatedWork W2776341574 @default.
- W1751450935 hasVolume "96" @default.
- W1751450935 isParatext "false" @default.
- W1751450935 isRetracted "false" @default.
- W1751450935 magId "1751450935" @default.
- W1751450935 workType "article" @default.