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- W1753210908 abstract "X‐ray Photoelectron Spectroscopy (XPS) was used to investigate the silicon nitride composition in stacked Si oxide/Si nitride/Si oxide nano‐layers. The standard approach for stoichiometry estimation, valid for homogeneous compositions, was corrected for the case of very small thickness and thin overlayer. Copyright © 2012 John Wiley & Sons, Ltd." @default.
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- W1753210908 date "2012-04-25" @default.
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- W1753210908 title "XPS composition study of stacked Si oxide/Si nitride/Si oxide nano-layers" @default.
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