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- W175890802 abstract "This study proposes a new control method of the 1st- and 2nd-order temperature coefficients of two-layer substrate composed of ZnO and Ta 2O5 thin films which have the 2nd-order temperature coefficients of delay time with the signs opposite to each other. As a result, a stable SAW substrate of ZnO/Ta2O5 /fused quartz showing the 3rd-order characteristics was developed" @default.
- W175890802 created "2016-06-24" @default.
- W175890802 creator A5026720070 @default.
- W175890802 date "2002-12-30" @default.
- W175890802 modified "2023-09-25" @default.
- W175890802 title "Control of second order temperature coefficient of SAW propagating in two thin film layers" @default.
- W175890802 cites W1992572163 @default.
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- W175890802 doi "https://doi.org/10.1109/ultsym.1993.339570" @default.
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