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- W1761462898 abstract "In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors." @default.
- W1761462898 created "2016-06-24" @default.
- W1761462898 creator A5000479314 @default.
- W1761462898 creator A5015025251 @default.
- W1761462898 creator A5036535149 @default.
- W1761462898 creator A5044826126 @default.
- W1761462898 creator A5053561558 @default.
- W1761462898 creator A5073902777 @default.
- W1761462898 creator A5077606862 @default.
- W1761462898 date "2009-01-01" @default.
- W1761462898 modified "2023-09-26" @default.
- W1761462898 title "Fabrication of micro-mechanical sensors with the polymer SU-8" @default.
- W1761462898 cites W2105220812 @default.
- W1761462898 hasPublicationYear "2009" @default.
- W1761462898 type Work @default.
- W1761462898 sameAs 1761462898 @default.
- W1761462898 citedByCount "0" @default.
- W1761462898 crossrefType "journal-article" @default.
- W1761462898 hasAuthorship W1761462898A5000479314 @default.
- W1761462898 hasAuthorship W1761462898A5015025251 @default.
- W1761462898 hasAuthorship W1761462898A5036535149 @default.
- W1761462898 hasAuthorship W1761462898A5044826126 @default.
- W1761462898 hasAuthorship W1761462898A5053561558 @default.
- W1761462898 hasAuthorship W1761462898A5073902777 @default.
- W1761462898 hasAuthorship W1761462898A5077606862 @default.
- W1761462898 hasConcept C115537861 @default.
- W1761462898 hasConcept C120665830 @default.
- W1761462898 hasConcept C121332964 @default.
- W1761462898 hasConcept C127413603 @default.
- W1761462898 hasConcept C136525101 @default.
- W1761462898 hasConcept C141354745 @default.
- W1761462898 hasConcept C142724271 @default.
- W1761462898 hasConcept C159985019 @default.
- W1761462898 hasConcept C160756335 @default.
- W1761462898 hasConcept C171250308 @default.
- W1761462898 hasConcept C192562407 @default.
- W1761462898 hasConcept C204787440 @default.
- W1761462898 hasConcept C2779227376 @default.
- W1761462898 hasConcept C2781355719 @default.
- W1761462898 hasConcept C33574316 @default.
- W1761462898 hasConcept C49040817 @default.
- W1761462898 hasConcept C521977710 @default.
- W1761462898 hasConcept C71924100 @default.
- W1761462898 hasConcept C78519656 @default.
- W1761462898 hasConceptScore W1761462898C115537861 @default.
- W1761462898 hasConceptScore W1761462898C120665830 @default.
- W1761462898 hasConceptScore W1761462898C121332964 @default.
- W1761462898 hasConceptScore W1761462898C127413603 @default.
- W1761462898 hasConceptScore W1761462898C136525101 @default.
- W1761462898 hasConceptScore W1761462898C141354745 @default.
- W1761462898 hasConceptScore W1761462898C142724271 @default.
- W1761462898 hasConceptScore W1761462898C159985019 @default.
- W1761462898 hasConceptScore W1761462898C160756335 @default.
- W1761462898 hasConceptScore W1761462898C171250308 @default.
- W1761462898 hasConceptScore W1761462898C192562407 @default.
- W1761462898 hasConceptScore W1761462898C204787440 @default.
- W1761462898 hasConceptScore W1761462898C2779227376 @default.
- W1761462898 hasConceptScore W1761462898C2781355719 @default.
- W1761462898 hasConceptScore W1761462898C33574316 @default.
- W1761462898 hasConceptScore W1761462898C49040817 @default.
- W1761462898 hasConceptScore W1761462898C521977710 @default.
- W1761462898 hasConceptScore W1761462898C71924100 @default.
- W1761462898 hasConceptScore W1761462898C78519656 @default.
- W1761462898 hasLocation W17614628981 @default.
- W1761462898 hasOpenAccess W1761462898 @default.
- W1761462898 hasPrimaryLocation W17614628981 @default.
- W1761462898 hasRelatedWork W1562712608 @default.
- W1761462898 hasRelatedWork W1977275527 @default.
- W1761462898 hasRelatedWork W1990172601 @default.
- W1761462898 hasRelatedWork W2007562013 @default.
- W1761462898 hasRelatedWork W2023996811 @default.
- W1761462898 hasRelatedWork W2028681389 @default.
- W1761462898 hasRelatedWork W2037783478 @default.
- W1761462898 hasRelatedWork W2050449422 @default.
- W1761462898 hasRelatedWork W2111668956 @default.
- W1761462898 hasRelatedWork W2361627365 @default.
- W1761462898 hasRelatedWork W2529387975 @default.
- W1761462898 hasRelatedWork W2757930307 @default.
- W1761462898 hasRelatedWork W825453118 @default.
- W1761462898 hasRelatedWork W883430238 @default.
- W1761462898 hasRelatedWork W1596672209 @default.
- W1761462898 hasRelatedWork W233919006 @default.
- W1761462898 hasRelatedWork W2463924665 @default.
- W1761462898 hasRelatedWork W2837600222 @default.
- W1761462898 hasRelatedWork W2837687536 @default.
- W1761462898 hasRelatedWork W2931848442 @default.
- W1761462898 isParatext "false" @default.
- W1761462898 isRetracted "false" @default.
- W1761462898 magId "1761462898" @default.
- W1761462898 workType "article" @default.