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- W176406987 abstract "The control of ultra-surface metallic impurities is necessary to control defects in semiconductor devices. One analytical method which can provide some spatial information of the contamination, distinguish between particulate versus plated contamination, and thereby allow the control of these impurities is Total reflection X-Ray Fluorescence (TXRF). Examples of real commercial processes are presented and include: cleaning, rinsing, dry etching, rapid thermal processing, and ion implantation." @default.
- W176406987 created "2016-06-24" @default.
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- W176406987 date "1990-01-01" @default.
- W176406987 modified "2023-09-23" @default.
- W176406987 title "CONTROL OF SEMICONDUCTOR SURFACE, TRACE METAL CONTAMINATION BY TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)" @default.
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- W176406987 doi "https://doi.org/10.1016/b978-0-444-88429-9.50094-x" @default.
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