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- W176572916 abstract "In this work we report the design and fabrication of linear electrostatic comb-drive actuated microgrippers. The actuators have been fabricated by surface micromachining of electroplated copper and nickel films. The fabrication is simple and includes UV lithography, electrodeposition, and wet etching processes. The fabrication characteristics are also discussed. The comb-drive structures feature fingers with different widths and gaps, and flexible hinges with a unidirectional linear actuation scheme. The comb-drive behavior is theoretically described with equations. The actuators have been simulated by finite element electromechanical models, which revealed important data such as motion behavior, operation conditions and stress concentration regions. The motion dependence on drive voltage for both cases were measured and compared with predictions from the simulation models. The models also included different schemes for the hinges supporting the driving section of the comb drive and the presented simulation results showed the effects of these springs on motion behavior." @default.
- W176572916 created "2016-06-24" @default.
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- W176572916 date "2003-01-01" @default.
- W176572916 modified "2023-09-24" @default.
- W176572916 title "Microgrippers Driven by Electrostatic Comb Drive Actuators" @default.
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