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- W1768774555 abstract "A photolithography workcell that allows all operations on a wafer lot, from resist coat through to inspection, to be executed by a single operator is described. The workcells are based on 5* steppers and in-line coat and develop tracks. Operation of the cell is heavily based on automation software, with a single operator-interface terminal to all subequipment and process control databases. A key benefit of the workcell is the environment in which a single operator has ownership for all aspects of the photolithographic process. Feedback on process quality is available by inspection 12 min after a lot has started. Key results from the workcell are: (1) rework rate reduced from 11% to less than 2%; (2) feedback time on a lot reduced from 8 h to 15 min; and (3) average active time of work-in-progress in the photo area reduced from 24 h to 8 h. >" @default.
- W1768774555 created "2016-06-24" @default.
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- W1768774555 date "2003-01-13" @default.
- W1768774555 modified "2023-09-27" @default.
- W1768774555 title "A fully integrated photolithography workcell" @default.
- W1768774555 doi "https://doi.org/10.1109/ismss.1989.77255" @default.
- W1768774555 hasPublicationYear "2003" @default.
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