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- W177395620 abstract "This book reports on applications of CVD metals, focusing on tungsten. The papers summarize results in the understanding of surface reactions; the modeling of reactor and deposition kinetics; the development of blanket and selective tungsten deposition processes; the characterization of tungsten films; and the rapid development in other CVD metals such as copper and aluminum." @default.
- W177395620 created "2016-06-24" @default.
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- W177395620 date "1990-01-01" @default.
- W177395620 modified "2023-09-24" @default.
- W177395620 title "Tungsten and other advanced metals for VLSI/ULSI applications 5" @default.
- W177395620 hasPublicationYear "1990" @default.
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