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- W1775049758 abstract "The implant area of virtually every production fab has some degree of protection against wafers receiving wrong implants. Host computer control has been used to eliminate the possibility of wrong implants, missing implants, and double implants throughout the implant area in spite of limitations imposed by implanters with varying degrees of software capabilities and hardware configurations, i.e., serial versus batch processing. The development of three complete host computer systems for all MOS6 Varian implanters has resulted in a methodology which can be applied to any manufacturing area." @default.
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- W1775049758 date "2002-12-24" @default.
- W1775049758 modified "2023-09-27" @default.
- W1775049758 title "Complete management of implant misprocessing risk through computer automation" @default.
- W1775049758 doi "https://doi.org/10.1109/iit.1996.586415" @default.
- W1775049758 hasPublicationYear "2002" @default.
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