Matches in SemOpenAlex for { <https://semopenalex.org/work/W1777304824> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W1777304824 endingPage "987" @default.
- W1777304824 startingPage "983" @default.
- W1777304824 abstract "Abstract The application of radio frequency glow discharge optacal emission spectroscopy for the investigation of the stability of different diffusion barriers for microelectronic applications against thermal diffusion of Cu is presented. Difficulties in the interpretation of the glow discharge results are overcome by performing an additional special experiment, where conductive and nonconductive parts are sputtered intentionally at the same time. As a consequence of the investigations, care must be taken, if glow discharge spectrometry is applied to samples with conductive and nonconductive components." @default.
- W1777304824 created "2016-06-24" @default.
- W1777304824 creator A5058107795 @default.
- W1777304824 creator A5069450301 @default.
- W1777304824 creator A5083323662 @default.
- W1777304824 date "2005-09-01" @default.
- W1777304824 modified "2023-09-27" @default.
- W1777304824 title "Focussing and defocussing effects at radio frequency glow discharge optical emission spectroscopy analyses of thin films with partly nonconductive components" @default.
- W1777304824 cites W1836770401 @default.
- W1777304824 cites W1972302286 @default.
- W1777304824 cites W1973231253 @default.
- W1777304824 cites W1980072469 @default.
- W1777304824 cites W1981571234 @default.
- W1777304824 cites W2006601107 @default.
- W1777304824 cites W2006756944 @default.
- W1777304824 cites W2018270859 @default.
- W1777304824 cites W2031584731 @default.
- W1777304824 cites W2061176162 @default.
- W1777304824 cites W2128066503 @default.
- W1777304824 cites W2129856418 @default.
- W1777304824 cites W2129931886 @default.
- W1777304824 cites W2132306780 @default.
- W1777304824 cites W4246180536 @default.
- W1777304824 doi "https://doi.org/10.3139/146.101129" @default.
- W1777304824 hasPublicationYear "2005" @default.
- W1777304824 type Work @default.
- W1777304824 sameAs 1777304824 @default.
- W1777304824 citedByCount "1" @default.
- W1777304824 countsByYear W17773048242012 @default.
- W1777304824 crossrefType "journal-article" @default.
- W1777304824 hasAuthorship W1777304824A5058107795 @default.
- W1777304824 hasAuthorship W1777304824A5069450301 @default.
- W1777304824 hasAuthorship W1777304824A5083323662 @default.
- W1777304824 hasConcept C113196181 @default.
- W1777304824 hasConcept C121332964 @default.
- W1777304824 hasConcept C1276947 @default.
- W1777304824 hasConcept C171250308 @default.
- W1777304824 hasConcept C175708663 @default.
- W1777304824 hasConcept C185592680 @default.
- W1777304824 hasConcept C19067145 @default.
- W1777304824 hasConcept C192562407 @default.
- W1777304824 hasConcept C2776595061 @default.
- W1777304824 hasConcept C32891209 @default.
- W1777304824 hasConcept C41008148 @default.
- W1777304824 hasConcept C43617362 @default.
- W1777304824 hasConcept C46141821 @default.
- W1777304824 hasConcept C4839761 @default.
- W1777304824 hasConcept C62520636 @default.
- W1777304824 hasConcept C74064498 @default.
- W1777304824 hasConcept C76155785 @default.
- W1777304824 hasConcept C82706917 @default.
- W1777304824 hasConcept C96141758 @default.
- W1777304824 hasConceptScore W1777304824C113196181 @default.
- W1777304824 hasConceptScore W1777304824C121332964 @default.
- W1777304824 hasConceptScore W1777304824C1276947 @default.
- W1777304824 hasConceptScore W1777304824C171250308 @default.
- W1777304824 hasConceptScore W1777304824C175708663 @default.
- W1777304824 hasConceptScore W1777304824C185592680 @default.
- W1777304824 hasConceptScore W1777304824C19067145 @default.
- W1777304824 hasConceptScore W1777304824C192562407 @default.
- W1777304824 hasConceptScore W1777304824C2776595061 @default.
- W1777304824 hasConceptScore W1777304824C32891209 @default.
- W1777304824 hasConceptScore W1777304824C41008148 @default.
- W1777304824 hasConceptScore W1777304824C43617362 @default.
- W1777304824 hasConceptScore W1777304824C46141821 @default.
- W1777304824 hasConceptScore W1777304824C4839761 @default.
- W1777304824 hasConceptScore W1777304824C62520636 @default.
- W1777304824 hasConceptScore W1777304824C74064498 @default.
- W1777304824 hasConceptScore W1777304824C76155785 @default.
- W1777304824 hasConceptScore W1777304824C82706917 @default.
- W1777304824 hasConceptScore W1777304824C96141758 @default.
- W1777304824 hasIssue "9" @default.
- W1777304824 hasLocation W17773048241 @default.
- W1777304824 hasOpenAccess W1777304824 @default.
- W1777304824 hasPrimaryLocation W17773048241 @default.
- W1777304824 hasRelatedWork W1482276656 @default.
- W1777304824 hasRelatedWork W1985064754 @default.
- W1777304824 hasRelatedWork W1989614425 @default.
- W1777304824 hasRelatedWork W2061307280 @default.
- W1777304824 hasRelatedWork W2099718011 @default.
- W1777304824 hasRelatedWork W2334789767 @default.
- W1777304824 hasRelatedWork W2790297317 @default.
- W1777304824 hasRelatedWork W2796892233 @default.
- W1777304824 hasRelatedWork W3136184407 @default.
- W1777304824 hasRelatedWork W2626203807 @default.
- W1777304824 hasVolume "96" @default.
- W1777304824 isParatext "false" @default.
- W1777304824 isRetracted "false" @default.
- W1777304824 magId "1777304824" @default.
- W1777304824 workType "article" @default.