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- W1780852887 abstract "This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost." @default.
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- W1780852887 date "2015-06-01" @default.
- W1780852887 modified "2023-10-16" @default.
- W1780852887 title "Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ" @default.
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- W1780852887 doi "https://doi.org/10.1109/transducers.2015.7181047" @default.
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