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- W1781904337 abstract "A metal-insulator-metal (MIM) capacitor process technology has been developed using highly reliable ultra-thin Ta/sub 2/O/sub 5/ capacitors with low pressure CVD-WN cylinder storage-nodes for 0.12 /spl mu/m-scale embedded DRAMs. The CVD-WN films using WF/sub 6/ and NF/sub 3/ gases have excellent characteristics with respect to surface morphology and step coverage in comparison with CVD-W films. As a result, the cell capacitance with CVD-WN cylinder storage-nodes is increased to 1.5 times as large as that of CVD-W cylinder storage-nodes. The CVD-WN cylinder capacitors can realize a 30 fF/cell capacitance with 0.6 /spl mu/m-height storage-nodes in an area of 0.25/spl times/0.5 /spl mu/m/sup 2/." @default.
- W1781904337 created "2016-06-24" @default.
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- W1781904337 date "2003-01-20" @default.
- W1781904337 modified "2023-09-25" @default.
- W1781904337 title "Highly reliable MIM capacitor technology using low pressure CVD-WN cylinder storage-node for 0.12 μm-scale embedded DRAM" @default.
- W1781904337 cites W1496828451 @default.
- W1781904337 doi "https://doi.org/10.1109/vlsit.1999.799329" @default.
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