Matches in SemOpenAlex for { <https://semopenalex.org/work/W1784391323> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1784391323 abstract "We developed dry etching for the fabrication of DFB lasers. Most of all, effects of dry etching conditions such as rf power and etch mask materials on the etching properties and overgrown active layers were investigated. Device characteristics and long-term stability of DFB laser fabricated by using a dry etched grating were also measured." @default.
- W1784391323 created "2016-06-24" @default.
- W1784391323 creator A5004300224 @default.
- W1784391323 creator A5004734540 @default.
- W1784391323 creator A5005956889 @default.
- W1784391323 creator A5010786496 @default.
- W1784391323 creator A5013394523 @default.
- W1784391323 creator A5045971485 @default.
- W1784391323 creator A5048262441 @default.
- W1784391323 creator A5059377255 @default.
- W1784391323 date "2003-11-21" @default.
- W1784391323 modified "2023-09-25" @default.
- W1784391323 title "Reliable and damage-free dry grating etching for the InGaAsP DFB laser diodes" @default.
- W1784391323 cites W1998908294 @default.
- W1784391323 cites W2025595135 @default.
- W1784391323 cites W2061685991 @default.
- W1784391323 doi "https://doi.org/10.1109/iciprm.2003.1205421" @default.
- W1784391323 hasPublicationYear "2003" @default.
- W1784391323 type Work @default.
- W1784391323 sameAs 1784391323 @default.
- W1784391323 citedByCount "0" @default.
- W1784391323 crossrefType "proceedings-article" @default.
- W1784391323 hasAuthorship W1784391323A5004300224 @default.
- W1784391323 hasAuthorship W1784391323A5004734540 @default.
- W1784391323 hasAuthorship W1784391323A5005956889 @default.
- W1784391323 hasAuthorship W1784391323A5010786496 @default.
- W1784391323 hasAuthorship W1784391323A5013394523 @default.
- W1784391323 hasAuthorship W1784391323A5045971485 @default.
- W1784391323 hasAuthorship W1784391323A5048262441 @default.
- W1784391323 hasAuthorship W1784391323A5059377255 @default.
- W1784391323 hasConcept C100460472 @default.
- W1784391323 hasConcept C120665830 @default.
- W1784391323 hasConcept C121332964 @default.
- W1784391323 hasConcept C121477167 @default.
- W1784391323 hasConcept C126753812 @default.
- W1784391323 hasConcept C1291036 @default.
- W1784391323 hasConcept C130472188 @default.
- W1784391323 hasConcept C136525101 @default.
- W1784391323 hasConcept C142724271 @default.
- W1784391323 hasConcept C159985019 @default.
- W1784391323 hasConcept C192562407 @default.
- W1784391323 hasConcept C204787440 @default.
- W1784391323 hasConcept C2777813233 @default.
- W1784391323 hasConcept C2779227376 @default.
- W1784391323 hasConcept C49040817 @default.
- W1784391323 hasConcept C520434653 @default.
- W1784391323 hasConcept C6260449 @default.
- W1784391323 hasConcept C71924100 @default.
- W1784391323 hasConcept C78434282 @default.
- W1784391323 hasConcept C927094 @default.
- W1784391323 hasConceptScore W1784391323C100460472 @default.
- W1784391323 hasConceptScore W1784391323C120665830 @default.
- W1784391323 hasConceptScore W1784391323C121332964 @default.
- W1784391323 hasConceptScore W1784391323C121477167 @default.
- W1784391323 hasConceptScore W1784391323C126753812 @default.
- W1784391323 hasConceptScore W1784391323C1291036 @default.
- W1784391323 hasConceptScore W1784391323C130472188 @default.
- W1784391323 hasConceptScore W1784391323C136525101 @default.
- W1784391323 hasConceptScore W1784391323C142724271 @default.
- W1784391323 hasConceptScore W1784391323C159985019 @default.
- W1784391323 hasConceptScore W1784391323C192562407 @default.
- W1784391323 hasConceptScore W1784391323C204787440 @default.
- W1784391323 hasConceptScore W1784391323C2777813233 @default.
- W1784391323 hasConceptScore W1784391323C2779227376 @default.
- W1784391323 hasConceptScore W1784391323C49040817 @default.
- W1784391323 hasConceptScore W1784391323C520434653 @default.
- W1784391323 hasConceptScore W1784391323C6260449 @default.
- W1784391323 hasConceptScore W1784391323C71924100 @default.
- W1784391323 hasConceptScore W1784391323C78434282 @default.
- W1784391323 hasConceptScore W1784391323C927094 @default.
- W1784391323 hasLocation W17843913231 @default.
- W1784391323 hasOpenAccess W1784391323 @default.
- W1784391323 hasPrimaryLocation W17843913231 @default.
- W1784391323 hasRelatedWork W1993601199 @default.
- W1784391323 hasRelatedWork W2016566690 @default.
- W1784391323 hasRelatedWork W2027471627 @default.
- W1784391323 hasRelatedWork W2032493682 @default.
- W1784391323 hasRelatedWork W2042367509 @default.
- W1784391323 hasRelatedWork W2056031862 @default.
- W1784391323 hasRelatedWork W2057317009 @default.
- W1784391323 hasRelatedWork W2086390057 @default.
- W1784391323 hasRelatedWork W2101585482 @default.
- W1784391323 hasRelatedWork W2110822782 @default.
- W1784391323 hasRelatedWork W2120366944 @default.
- W1784391323 hasRelatedWork W2130561417 @default.
- W1784391323 hasRelatedWork W2135117280 @default.
- W1784391323 hasRelatedWork W2162257430 @default.
- W1784391323 hasRelatedWork W2199340744 @default.
- W1784391323 hasRelatedWork W2486375169 @default.
- W1784391323 hasRelatedWork W2608691433 @default.
- W1784391323 hasRelatedWork W2772570952 @default.
- W1784391323 hasRelatedWork W3008827297 @default.
- W1784391323 hasRelatedWork W68105600 @default.
- W1784391323 isParatext "false" @default.
- W1784391323 isRetracted "false" @default.
- W1784391323 magId "1784391323" @default.
- W1784391323 workType "article" @default.