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- W179193818 abstract "This document is the fourth sub-report of the EUV AIM design study being conducted at LLNL on behalf of International SEMATECH (ISMT) and addresses the issue of preliminary system costing. The purpose of the LLNL study, as identified in section 1.2 of the statement of work, is to research the basic user requirements of an actinic defect characterization tool, potential design configurations and top-level specifications. The objectives of this design study specifically identified in section 1.3 of the statement of work were to: (1) Determine the user requirements of an actinic defect characterization tool; (2) Determine if an EUV AIM tool is an appropriate platform for actinic defect characterization; (3) Determine possible design configurations and top-level performance specifications; (4) Identify potential technical issues and risks of different technical approaches; (5) Provide estimates of cost relating to different technical approaches; and (6) Provide simulated performance for key subsystems and the entire system. The sub-sections of the study to be addressed were accordingly defined in the statement of work as being: (1) Formulation of top-level specifications; (2) Identification of system configurations suitable for meeting the top-level specifications; (3) Preliminary design of imaging systems; (4) Preliminary design of illumination systems; (5) Prediction and comparison of performance through aerial image calculation; (6) Identification of sub-system requirements; (7) Identification of potential vendors; (8) Estimation of system cost; (9) Identification of technical issues; and (10) Definition of technology transfer or development required. Points 1 to 7 and 9 to 10 are addressed in separate reports to ISMT. This report addresses item 8, system costing, and is provided as a separate report so that its content can be kept confidential at the discretion of ISMT. In this analysis we cost two systems--one based on normal-incidence multilayer-coated optics and another based on zone plate optics. The costing of these two systems are provided separately because the fabrication costs and technical challenges associated with each approach are different in areas relating to optics fabrication, and are highlighted by providing separate costing for the two approaches." @default.
- W179193818 created "2016-06-24" @default.
- W179193818 creator A5046681311 @default.
- W179193818 creator A5049340090 @default.
- W179193818 date "2002-08-20" @default.
- W179193818 modified "2023-10-18" @default.
- W179193818 title "Estimated Costing of an EUV Mask Inspection Microscope" @default.
- W179193818 doi "https://doi.org/10.2172/15002103" @default.
- W179193818 hasPublicationYear "2002" @default.
- W179193818 type Work @default.
- W179193818 sameAs 179193818 @default.
- W179193818 citedByCount "0" @default.
- W179193818 crossrefType "report" @default.
- W179193818 hasAuthorship W179193818A5046681311 @default.
- W179193818 hasAuthorship W179193818A5049340090 @default.
- W179193818 hasBestOaLocation W1791938182 @default.
- W179193818 hasConcept C107457646 @default.
- W179193818 hasConcept C116834253 @default.
- W179193818 hasConcept C120665830 @default.
- W179193818 hasConcept C121332964 @default.
- W179193818 hasConcept C127413603 @default.
- W179193818 hasConcept C144133560 @default.
- W179193818 hasConcept C162853370 @default.
- W179193818 hasConcept C162996421 @default.
- W179193818 hasConcept C164624739 @default.
- W179193818 hasConcept C170130773 @default.
- W179193818 hasConcept C17744445 @default.
- W179193818 hasConcept C199539241 @default.
- W179193818 hasConcept C199639397 @default.
- W179193818 hasConcept C200601418 @default.
- W179193818 hasConcept C201995342 @default.
- W179193818 hasConcept C202532154 @default.
- W179193818 hasConcept C2777026412 @default.
- W179193818 hasConcept C41008148 @default.
- W179193818 hasConcept C539667460 @default.
- W179193818 hasConcept C59822182 @default.
- W179193818 hasConcept C86803240 @default.
- W179193818 hasConceptScore W179193818C107457646 @default.
- W179193818 hasConceptScore W179193818C116834253 @default.
- W179193818 hasConceptScore W179193818C120665830 @default.
- W179193818 hasConceptScore W179193818C121332964 @default.
- W179193818 hasConceptScore W179193818C127413603 @default.
- W179193818 hasConceptScore W179193818C144133560 @default.
- W179193818 hasConceptScore W179193818C162853370 @default.
- W179193818 hasConceptScore W179193818C162996421 @default.
- W179193818 hasConceptScore W179193818C164624739 @default.
- W179193818 hasConceptScore W179193818C170130773 @default.
- W179193818 hasConceptScore W179193818C17744445 @default.
- W179193818 hasConceptScore W179193818C199539241 @default.
- W179193818 hasConceptScore W179193818C199639397 @default.
- W179193818 hasConceptScore W179193818C200601418 @default.
- W179193818 hasConceptScore W179193818C201995342 @default.
- W179193818 hasConceptScore W179193818C202532154 @default.
- W179193818 hasConceptScore W179193818C2777026412 @default.
- W179193818 hasConceptScore W179193818C41008148 @default.
- W179193818 hasConceptScore W179193818C539667460 @default.
- W179193818 hasConceptScore W179193818C59822182 @default.
- W179193818 hasConceptScore W179193818C86803240 @default.
- W179193818 hasLocation W1791938181 @default.
- W179193818 hasLocation W1791938182 @default.
- W179193818 hasLocation W1791938183 @default.
- W179193818 hasOpenAccess W179193818 @default.
- W179193818 hasPrimaryLocation W1791938181 @default.
- W179193818 hasRelatedWork W13908128 @default.
- W179193818 hasRelatedWork W179193818 @default.
- W179193818 hasRelatedWork W1981421090 @default.
- W179193818 hasRelatedWork W2076203124 @default.
- W179193818 hasRelatedWork W2376906283 @default.
- W179193818 hasRelatedWork W2770966078 @default.
- W179193818 hasRelatedWork W2899084033 @default.
- W179193818 hasRelatedWork W3128689118 @default.
- W179193818 hasRelatedWork W4308824156 @default.
- W179193818 hasRelatedWork W92679594 @default.
- W179193818 isParatext "false" @default.
- W179193818 isRetracted "false" @default.
- W179193818 magId "179193818" @default.
- W179193818 workType "report" @default.