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- W1797827240 abstract "Summary form only given, as follows. The operation characteristics of an inductively-coupled plasma source have been measured by several different measurement techniques: Langmuir probe, 36 GHz heterodyne interferometer, optical emission spectroscopy and plasma impedance probe. The Ar plasma is generated by exciting a planar inductive coil with 13.56 MHz RF power which is coupled into the 400 mm diameter plasma chamber through a quartz window. Measurements have been made for two different size of antenna: 150 mm and 270 mm with window sizes 200 mm and 320 mm, respectively. The tip of the Langmuir probe is isolated from the bias and measurement electronics by an inductor to force the probe tip to follow the AC plasma floating potential. The 36 GHz heterodyne interferometer employs two free running Gunn oscillators and the phase change was measured by a 70 MHz quadrature mixer. The measurement results have been used to calibrate the Langmuir probe. The RF power absorbed by the plasma was measured by the plasma impedance probe placed between the antenna and matching network. Spatial variations of optical emission from the plasma for different operation conditions have also been measured by a monochrometer/CCD system with an optical fiber head." @default.
- W1797827240 created "2016-06-24" @default.
- W1797827240 creator A5003432761 @default.
- W1797827240 creator A5020558381 @default.
- W1797827240 creator A5050869909 @default.
- W1797827240 creator A5054305311 @default.
- W1797827240 creator A5065310089 @default.
- W1797827240 creator A5087196886 @default.
- W1797827240 creator A5090786012 @default.
- W1797827240 date "2002-11-22" @default.
- W1797827240 modified "2023-10-18" @default.
- W1797827240 title "Operation characteristics of an ICP plasma source" @default.
- W1797827240 doi "https://doi.org/10.1109/plasma.1997.604426" @default.
- W1797827240 hasPublicationYear "2002" @default.
- W1797827240 type Work @default.
- W1797827240 sameAs 1797827240 @default.
- W1797827240 citedByCount "0" @default.
- W1797827240 crossrefType "proceedings-article" @default.
- W1797827240 hasAuthorship W1797827240A5003432761 @default.
- W1797827240 hasAuthorship W1797827240A5020558381 @default.
- W1797827240 hasAuthorship W1797827240A5050869909 @default.
- W1797827240 hasAuthorship W1797827240A5054305311 @default.
- W1797827240 hasAuthorship W1797827240A5065310089 @default.
- W1797827240 hasAuthorship W1797827240A5087196886 @default.
- W1797827240 hasAuthorship W1797827240A5090786012 @default.
- W1797827240 hasConcept C119599485 @default.
- W1797827240 hasConcept C120665830 @default.
- W1797827240 hasConcept C121332964 @default.
- W1797827240 hasConcept C127413603 @default.
- W1797827240 hasConcept C166689943 @default.
- W1797827240 hasConcept C176118016 @default.
- W1797827240 hasConcept C192562407 @default.
- W1797827240 hasConcept C21822782 @default.
- W1797827240 hasConcept C43503373 @default.
- W1797827240 hasConcept C62520636 @default.
- W1797827240 hasConcept C82706917 @default.
- W1797827240 hasConcept C95974651 @default.
- W1797827240 hasConceptScore W1797827240C119599485 @default.
- W1797827240 hasConceptScore W1797827240C120665830 @default.
- W1797827240 hasConceptScore W1797827240C121332964 @default.
- W1797827240 hasConceptScore W1797827240C127413603 @default.
- W1797827240 hasConceptScore W1797827240C166689943 @default.
- W1797827240 hasConceptScore W1797827240C176118016 @default.
- W1797827240 hasConceptScore W1797827240C192562407 @default.
- W1797827240 hasConceptScore W1797827240C21822782 @default.
- W1797827240 hasConceptScore W1797827240C43503373 @default.
- W1797827240 hasConceptScore W1797827240C62520636 @default.
- W1797827240 hasConceptScore W1797827240C82706917 @default.
- W1797827240 hasConceptScore W1797827240C95974651 @default.
- W1797827240 hasLocation W17978272401 @default.
- W1797827240 hasOpenAccess W1797827240 @default.
- W1797827240 hasPrimaryLocation W17978272401 @default.
- W1797827240 hasRelatedWork W1165192472 @default.
- W1797827240 hasRelatedWork W1834659080 @default.
- W1797827240 hasRelatedWork W1978165824 @default.
- W1797827240 hasRelatedWork W1987243799 @default.
- W1797827240 hasRelatedWork W2007088614 @default.
- W1797827240 hasRelatedWork W2018943497 @default.
- W1797827240 hasRelatedWork W2025466429 @default.
- W1797827240 hasRelatedWork W2042214121 @default.
- W1797827240 hasRelatedWork W2046757383 @default.
- W1797827240 hasRelatedWork W2054685634 @default.
- W1797827240 hasRelatedWork W2079686342 @default.
- W1797827240 hasRelatedWork W2101536412 @default.
- W1797827240 hasRelatedWork W2133088321 @default.
- W1797827240 hasRelatedWork W2151340902 @default.
- W1797827240 hasRelatedWork W2153873499 @default.
- W1797827240 hasRelatedWork W2163882211 @default.
- W1797827240 hasRelatedWork W2576737053 @default.
- W1797827240 hasRelatedWork W2921618181 @default.
- W1797827240 hasRelatedWork W3112007360 @default.
- W1797827240 hasRelatedWork W2130782555 @default.
- W1797827240 isParatext "false" @default.
- W1797827240 isRetracted "false" @default.
- W1797827240 magId "1797827240" @default.
- W1797827240 workType "article" @default.