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• W1799676312 abstract "This paper presents the design methodology for the micromachined circuits operating in the microwave and mm-wave frequency region. The design is based on dividing the circuit into membrane-supported components, bulk components and membrane to bulk transitions. Every region is modeled using appropriate techniques and using full-wave electromagnetic simulation software. As illustrative examples, the design of band-pass filter structures and double-folded slot antenna arrays are briefly described. The micromachined structures were fabricated and measured results are presented." @default.
• W1799676312 created "2016-06-24" @default.
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• W1799676312 date "2003-06-26" @default.
• W1799676312 modified "2023-09-26" @default.
• W1799676312 title "Computer-aided design of mm-wave circuits fabricated on micromachined silicon" @default.
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• W1799676312 doi "https://doi.org/10.1109/smicnd.2002.1105792" @default.
• W1799676312 hasPublicationYear "2003" @default.
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