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Matches in SemOpenAlex for { <https://semopenalex.org/work/W180858334> ?p ?o ?g. }

• W180858334 abstract "A method for direct chemical vapor deposition of silicon carbide to substrates, especially nuclear waste particles, is provided by the thermal decomposition of methylsilane at 800 to 1050/sup 0/C when the substrates have been confined within a suitable coating environment." @default.
• W180858334 created "2016-06-24" @default.
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• W180858334 date "1982-03-19" @default.
• W180858334 modified "2023-09-27" @default.
• W180858334 title "Method of deposition of silicon carbide layers on substrates" @default.
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