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- W180870562 abstract "This paper describes our investigations on high-efficiency a-Si solar cells and high-quality microcrystalline ( μc) SiC films fabricated by the CPM (Controlled Plasma Magnetron) method." @default.
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- W180870562 date "1989-01-01" @default.
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- W180870562 title "High-Quality Microcrystalline SiC Films Fabricated by the Controlled Plasma Magnetron Method" @default.
- W180870562 doi "https://doi.org/10.1007/978-3-642-75048-9_11" @default.
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