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- W181230551 abstract "By means of GILD (gas immersion laser doping) on the surface of n-type Si samples, with BBr/sub 3/ vapor as the working material, Si-photocells doped with boron have been fabricated. The maximum doping concentration is 1.2 x 10/sup 21/ B/sup +//cm/sup 3/ near the surface, the junction depth is 0.08 ..mu..m at 10/sup 17/ B/sup +//cm/sup 3/, and the conversion efficiency is about 9.5% without antireflection coatings." @default.
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- W181230551 date "1987-09-01" @default.
- W181230551 modified "2023-09-24" @default.
- W181230551 title "Si-photocell with an ultrashallow junction by gas immersion laser doping and its characteristics" @default.
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