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- W1815494467 abstract "This paper reports a novel ultrasonic driven microvibromotor. An angular and linear microvibromotor is obtained from a motorization by surface acoustic waves generated from an interdigital transducer on a LiNbO/sub 3/ substrate. The linear and rotational movements are obtained according to the position of the slider with respect to the acoustic beam. The displacement of the slider is controlled from the burst duration applied across the interdigital transducer. This device is capable of nanometer resolution, for a travel area of over 40 mm square and of rotation until 360/spl deg/ with a resolution better than 0.1." @default.
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- W1815494467 date "2002-11-22" @default.
- W1815494467 modified "2023-09-23" @default.
- W1815494467 title "Angular and linear microvibromotor" @default.
- W1815494467 cites W2101062903 @default.
- W1815494467 doi "https://doi.org/10.1109/sensor.1997.613581" @default.
- W1815494467 hasPublicationYear "2002" @default.
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