Matches in SemOpenAlex for { <https://semopenalex.org/work/W1820508724> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1820508724 abstract "Rapid thermal annihilation of microdefects in CZ Si crystals has been studied. The microdefects can be effectively annihilated by RTA for 5/spl sim/60 sec. at temperature over the range of 900/spl sim/1200/spl deg/C. The annihilation of microdefects is not dependent on annealing duration. The concentration of the interstitial oxygen impurities is remarkably increased with microdefect annihilation. It is concluded that the microdefects are involved during RTA process. It is believed that the thermal stress at microdefects induced by RTA is the main cause of microdefect annihilation." @default.
- W1820508724 created "2016-06-24" @default.
- W1820508724 creator A5007394184 @default.
- W1820508724 creator A5017260952 @default.
- W1820508724 creator A5042102857 @default.
- W1820508724 creator A5070198860 @default.
- W1820508724 creator A5076887322 @default.
- W1820508724 creator A5084398977 @default.
- W1820508724 date "2002-11-19" @default.
- W1820508724 modified "2023-09-27" @default.
- W1820508724 title "Rapid thermal annihilation of microdefects in CZ Si crystals" @default.
- W1820508724 cites W1974645842 @default.
- W1820508724 cites W1983419238 @default.
- W1820508724 cites W1997380881 @default.
- W1820508724 cites W2041966184 @default.
- W1820508724 cites W2059785133 @default.
- W1820508724 doi "https://doi.org/10.1109/icsict.1995.503358" @default.
- W1820508724 hasPublicationYear "2002" @default.
- W1820508724 type Work @default.
- W1820508724 sameAs 1820508724 @default.
- W1820508724 citedByCount "0" @default.
- W1820508724 crossrefType "proceedings-article" @default.
- W1820508724 hasAuthorship W1820508724A5007394184 @default.
- W1820508724 hasAuthorship W1820508724A5017260952 @default.
- W1820508724 hasAuthorship W1820508724A5042102857 @default.
- W1820508724 hasAuthorship W1820508724A5070198860 @default.
- W1820508724 hasAuthorship W1820508724A5076887322 @default.
- W1820508724 hasAuthorship W1820508724A5084398977 @default.
- W1820508724 hasConcept C121332964 @default.
- W1820508724 hasConcept C147120987 @default.
- W1820508724 hasConcept C159985019 @default.
- W1820508724 hasConcept C164675345 @default.
- W1820508724 hasConcept C178790620 @default.
- W1820508724 hasConcept C185544564 @default.
- W1820508724 hasConcept C185592680 @default.
- W1820508724 hasConcept C192562407 @default.
- W1820508724 hasConcept C201941533 @default.
- W1820508724 hasConcept C202100949 @default.
- W1820508724 hasConcept C204530211 @default.
- W1820508724 hasConcept C26873012 @default.
- W1820508724 hasConcept C2777855556 @default.
- W1820508724 hasConcept C2985595821 @default.
- W1820508724 hasConcept C39353612 @default.
- W1820508724 hasConcept C41999313 @default.
- W1820508724 hasConcept C71987851 @default.
- W1820508724 hasConcept C8010536 @default.
- W1820508724 hasConcept C97355855 @default.
- W1820508724 hasConceptScore W1820508724C121332964 @default.
- W1820508724 hasConceptScore W1820508724C147120987 @default.
- W1820508724 hasConceptScore W1820508724C159985019 @default.
- W1820508724 hasConceptScore W1820508724C164675345 @default.
- W1820508724 hasConceptScore W1820508724C178790620 @default.
- W1820508724 hasConceptScore W1820508724C185544564 @default.
- W1820508724 hasConceptScore W1820508724C185592680 @default.
- W1820508724 hasConceptScore W1820508724C192562407 @default.
- W1820508724 hasConceptScore W1820508724C201941533 @default.
- W1820508724 hasConceptScore W1820508724C202100949 @default.
- W1820508724 hasConceptScore W1820508724C204530211 @default.
- W1820508724 hasConceptScore W1820508724C26873012 @default.
- W1820508724 hasConceptScore W1820508724C2777855556 @default.
- W1820508724 hasConceptScore W1820508724C2985595821 @default.
- W1820508724 hasConceptScore W1820508724C39353612 @default.
- W1820508724 hasConceptScore W1820508724C41999313 @default.
- W1820508724 hasConceptScore W1820508724C71987851 @default.
- W1820508724 hasConceptScore W1820508724C8010536 @default.
- W1820508724 hasConceptScore W1820508724C97355855 @default.
- W1820508724 hasLocation W18205087241 @default.
- W1820508724 hasOpenAccess W1820508724 @default.
- W1820508724 hasPrimaryLocation W18205087241 @default.
- W1820508724 hasRelatedWork W1976422510 @default.
- W1820508724 hasRelatedWork W1977111507 @default.
- W1820508724 hasRelatedWork W1985472058 @default.
- W1820508724 hasRelatedWork W1997917334 @default.
- W1820508724 hasRelatedWork W2011034876 @default.
- W1820508724 hasRelatedWork W2016640738 @default.
- W1820508724 hasRelatedWork W2021214113 @default.
- W1820508724 hasRelatedWork W2030512404 @default.
- W1820508724 hasRelatedWork W2043506635 @default.
- W1820508724 hasRelatedWork W2056953359 @default.
- W1820508724 hasRelatedWork W2087961821 @default.
- W1820508724 hasRelatedWork W2097123037 @default.
- W1820508724 hasRelatedWork W2110072321 @default.
- W1820508724 hasRelatedWork W2138069088 @default.
- W1820508724 hasRelatedWork W2151037148 @default.
- W1820508724 hasRelatedWork W2543717672 @default.
- W1820508724 hasRelatedWork W2625341847 @default.
- W1820508724 hasRelatedWork W2652258870 @default.
- W1820508724 hasRelatedWork W3203792532 @default.
- W1820508724 hasRelatedWork W590281430 @default.
- W1820508724 isParatext "false" @default.
- W1820508724 isRetracted "false" @default.
- W1820508724 magId "1820508724" @default.
- W1820508724 workType "article" @default.