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- W1826803418 abstract "We have fabricated the local vacuum package with Si field emitter array on Si substrate. To keep the pressure for electron emission, the titanium getter of evaporation type was made a bridge structure with Si field emitter array in local vacuum package. The local vacuum package technique adapted to the IC process for on-chip device. Therefore, this technique is very useful for many applications with high performance." @default.
- W1826803418 created "2016-06-24" @default.
- W1826803418 creator A5000723708 @default.
- W1826803418 creator A5041568496 @default.
- W1826803418 creator A5058869309 @default.
- W1826803418 creator A5064182187 @default.
- W1826803418 creator A5069219753 @default.
- W1826803418 creator A5087233037 @default.
- W1826803418 date "2004-11-15" @default.
- W1826803418 modified "2023-09-27" @default.
- W1826803418 title "Fabrication of Si field emitter array in local vacuum package" @default.
- W1826803418 cites W2117631851 @default.
- W1826803418 doi "https://doi.org/10.1109/ivnc.2004.1355021" @default.
- W1826803418 hasPublicationYear "2004" @default.
- W1826803418 type Work @default.
- W1826803418 sameAs 1826803418 @default.
- W1826803418 citedByCount "0" @default.
- W1826803418 crossrefType "proceedings-article" @default.
- W1826803418 hasAuthorship W1826803418A5000723708 @default.
- W1826803418 hasAuthorship W1826803418A5041568496 @default.
- W1826803418 hasAuthorship W1826803418A5058869309 @default.
- W1826803418 hasAuthorship W1826803418A5064182187 @default.
- W1826803418 hasAuthorship W1826803418A5069219753 @default.
- W1826803418 hasAuthorship W1826803418A5087233037 @default.
- W1826803418 hasConcept C111368507 @default.
- W1826803418 hasConcept C121029787 @default.
- W1826803418 hasConcept C121332964 @default.
- W1826803418 hasConcept C125099081 @default.
- W1826803418 hasConcept C127313418 @default.
- W1826803418 hasConcept C136525101 @default.
- W1826803418 hasConcept C142724271 @default.
- W1826803418 hasConcept C147120987 @default.
- W1826803418 hasConcept C159985019 @default.
- W1826803418 hasConcept C171250308 @default.
- W1826803418 hasConcept C19067145 @default.
- W1826803418 hasConcept C192562407 @default.
- W1826803418 hasConcept C204787440 @default.
- W1826803418 hasConcept C2777289219 @default.
- W1826803418 hasConcept C2777527079 @default.
- W1826803418 hasConcept C2778347521 @default.
- W1826803418 hasConcept C2779192298 @default.
- W1826803418 hasConcept C46918542 @default.
- W1826803418 hasConcept C49040817 @default.
- W1826803418 hasConcept C62520636 @default.
- W1826803418 hasConcept C71924100 @default.
- W1826803418 hasConcept C82225425 @default.
- W1826803418 hasConceptScore W1826803418C111368507 @default.
- W1826803418 hasConceptScore W1826803418C121029787 @default.
- W1826803418 hasConceptScore W1826803418C121332964 @default.
- W1826803418 hasConceptScore W1826803418C125099081 @default.
- W1826803418 hasConceptScore W1826803418C127313418 @default.
- W1826803418 hasConceptScore W1826803418C136525101 @default.
- W1826803418 hasConceptScore W1826803418C142724271 @default.
- W1826803418 hasConceptScore W1826803418C147120987 @default.
- W1826803418 hasConceptScore W1826803418C159985019 @default.
- W1826803418 hasConceptScore W1826803418C171250308 @default.
- W1826803418 hasConceptScore W1826803418C19067145 @default.
- W1826803418 hasConceptScore W1826803418C192562407 @default.
- W1826803418 hasConceptScore W1826803418C204787440 @default.
- W1826803418 hasConceptScore W1826803418C2777289219 @default.
- W1826803418 hasConceptScore W1826803418C2777527079 @default.
- W1826803418 hasConceptScore W1826803418C2778347521 @default.
- W1826803418 hasConceptScore W1826803418C2779192298 @default.
- W1826803418 hasConceptScore W1826803418C46918542 @default.
- W1826803418 hasConceptScore W1826803418C49040817 @default.
- W1826803418 hasConceptScore W1826803418C62520636 @default.
- W1826803418 hasConceptScore W1826803418C71924100 @default.
- W1826803418 hasConceptScore W1826803418C82225425 @default.
- W1826803418 hasLocation W18268034181 @default.
- W1826803418 hasOpenAccess W1826803418 @default.
- W1826803418 hasPrimaryLocation W18268034181 @default.
- W1826803418 hasRelatedWork W1588711558 @default.
- W1826803418 hasRelatedWork W1987238717 @default.
- W1826803418 hasRelatedWork W2003797184 @default.
- W1826803418 hasRelatedWork W2016294473 @default.
- W1826803418 hasRelatedWork W2030072078 @default.
- W1826803418 hasRelatedWork W2051083093 @default.
- W1826803418 hasRelatedWork W2065688242 @default.
- W1826803418 hasRelatedWork W2072870113 @default.
- W1826803418 hasRelatedWork W2084498209 @default.
- W1826803418 hasRelatedWork W2110380483 @default.
- W1826803418 hasRelatedWork W2144467267 @default.
- W1826803418 hasRelatedWork W2320019166 @default.
- W1826803418 hasRelatedWork W2760636455 @default.
- W1826803418 hasRelatedWork W2903319762 @default.
- W1826803418 hasRelatedWork W3036922713 @default.
- W1826803418 hasRelatedWork W3042847638 @default.
- W1826803418 hasRelatedWork W3196556093 @default.
- W1826803418 hasRelatedWork W1562661970 @default.
- W1826803418 hasRelatedWork W1659379356 @default.
- W1826803418 hasRelatedWork W3030924203 @default.
- W1826803418 isParatext "false" @default.
- W1826803418 isRetracted "false" @default.
- W1826803418 magId "1826803418" @default.
- W1826803418 workType "article" @default.