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- W1827120961 abstract "A MOSFET structure was visualized in a nanometer scale using STM. Topographic STM images show the source/drain (S/D) regions, the poly-Si gate, and the very thin gate oxide layer on a nanometer scale. The results show that STM is a powerful technique to determine the depth of the S/D, the channel length, and the local carrier concentration." @default.
- W1827120961 created "2016-06-24" @default.
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- W1827120961 date "2002-11-13" @default.
- W1827120961 modified "2023-09-25" @default.
- W1827120961 title "Characterization of a 0.1 μm MOSFET using cross-sectional scanning tunneling microscopy" @default.
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- W1827120961 doi "https://doi.org/10.1109/drc.2001.937871" @default.
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