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- W1829623391 abstract "A contact formation process for fabricating sub-0.5- mu m contacts is proposed. By using a thin polysilicon layer and a spacer as the hard mask, the contact process bias can be reduced by as much as 0.4-0.5 mu m. The feasibility of this contact technology for ULSI applications is demonstrated by low contact resistivity ( >" @default.
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- W1829623391 date "2002-12-04" @default.
- W1829623391 modified "2023-09-22" @default.
- W1829623391 title "A polysilicon hard-mask/spacer process for sub-0.5 micron ULSI contacts" @default.
- W1829623391 doi "https://doi.org/10.1109/vmic.1990.127934" @default.
- W1829623391 hasPublicationYear "2002" @default.
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