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- W1830861785 abstract "The authors present the methodology used to install and start up a new plasma etcher for production in a 1.0 micron/CMOS manufacturing line. It was demonstrated that a coordinated effort by equipment engineering, process engineering, technology development, equipment maintenance, and a vendor/partner can result in a quality-oriented start up. A specification was written to incorporate the procedures for installation, start up, equipment baselining, process characterization, and transfer to production on new equipment. It is noted that an ongoing relationship with a vendor/partner and all groups within the fabrication area will enable continuous improvement to the existing equipment and any new equipment being purchased. >" @default.
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- W1830861785 date "2002-12-09" @default.
- W1830861785 modified "2023-09-27" @default.
- W1830861785 title "Equipment start-up in a manufacturing environment" @default.
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- W1830861785 doi "https://doi.org/10.1109/ismss.1991.146266" @default.
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