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- W1830882561 abstract "The trend toward automated manufacturing increases the importance of controlling static charge to eliminate ESD and contamination within equipment. This paper discusses problems, sources and control methods for static charge. It examines methods used to control static charges in semiconductor production tools. Application of air ionizers in production automation are presented." @default.
- W1830882561 created "2016-06-24" @default.
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- W1830882561 date "2002-12-17" @default.
- W1830882561 modified "2023-09-25" @default.
- W1830882561 title "Reducing static related defects and controller problems in semiconductor production automation equipment" @default.
- W1830882561 doi "https://doi.org/10.1109/asmc.1994.588206" @default.
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