Matches in SemOpenAlex for { <https://semopenalex.org/work/W1830888947> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1830888947 abstract "The electrical characteristics and the chemical composition profilesdetermined by XPS and SIMS for aluminum oxide thin filmsdeposited by pulsed ultrasonic spray pyrolysis are reported. Thefilms were deposited on c-Si at 550 oC using a chemical solution ofaluminum acetylacetonate as source of aluminum and N,NDimethylformamideas solvent, in addition a H2O-NH4OH mistwas supplied simultaneously during deposition to improve theoverall properties of these films. The results show that there isnitrogen incorporation in the films at the interface with the Sisubstrate. There is also a clear migration of silicon into thedeposited film. The thickness of the films was in the range of 30nm. Infrared spectroscopy also shows the presence of Si-O bonds.The dielectric constant for these films was higher than 8 and theirinterface trap density at midgap was in the 1010 eV-1cm-2 range." @default.
- W1830888947 created "2016-06-24" @default.
- W1830888947 creator A5002735177 @default.
- W1830888947 creator A5013855238 @default.
- W1830888947 creator A5033934137 @default.
- W1830888947 creator A5041339249 @default.
- W1830888947 creator A5045035598 @default.
- W1830888947 creator A5066006505 @default.
- W1830888947 creator A5069966967 @default.
- W1830888947 creator A5080485241 @default.
- W1830888947 creator A5087680343 @default.
- W1830888947 date "2019-12-17" @default.
- W1830888947 modified "2023-10-01" @default.
- W1830888947 title "Nitrogen Incorporation in Al2O3 Thin Films Prepared by Pulsed Ultrasonic Sprayed Pyrolysis" @default.
- W1830888947 doi "https://doi.org/10.1149/1.3206618" @default.
- W1830888947 hasPublicationYear "2019" @default.
- W1830888947 type Work @default.
- W1830888947 sameAs 1830888947 @default.
- W1830888947 citedByCount "3" @default.
- W1830888947 countsByYear W18308889472013 @default.
- W1830888947 countsByYear W18308889472014 @default.
- W1830888947 crossrefType "journal-article" @default.
- W1830888947 hasAuthorship W1830888947A5002735177 @default.
- W1830888947 hasAuthorship W1830888947A5013855238 @default.
- W1830888947 hasAuthorship W1830888947A5033934137 @default.
- W1830888947 hasAuthorship W1830888947A5041339249 @default.
- W1830888947 hasAuthorship W1830888947A5045035598 @default.
- W1830888947 hasAuthorship W1830888947A5066006505 @default.
- W1830888947 hasAuthorship W1830888947A5069966967 @default.
- W1830888947 hasAuthorship W1830888947A5080485241 @default.
- W1830888947 hasAuthorship W1830888947A5087680343 @default.
- W1830888947 hasConcept C111368507 @default.
- W1830888947 hasConcept C113196181 @default.
- W1830888947 hasConcept C127313418 @default.
- W1830888947 hasConcept C127413603 @default.
- W1830888947 hasConcept C133386390 @default.
- W1830888947 hasConcept C159985019 @default.
- W1830888947 hasConcept C171250308 @default.
- W1830888947 hasConcept C175708663 @default.
- W1830888947 hasConcept C178790620 @default.
- W1830888947 hasConcept C185592680 @default.
- W1830888947 hasConcept C19067145 @default.
- W1830888947 hasConcept C191897082 @default.
- W1830888947 hasConcept C192562407 @default.
- W1830888947 hasConcept C2777289219 @default.
- W1830888947 hasConcept C2777431650 @default.
- W1830888947 hasConcept C2779105228 @default.
- W1830888947 hasConcept C2779851234 @default.
- W1830888947 hasConcept C36759035 @default.
- W1830888947 hasConcept C42360764 @default.
- W1830888947 hasConcept C49040817 @default.
- W1830888947 hasConcept C513153333 @default.
- W1830888947 hasConcept C537208039 @default.
- W1830888947 hasConcept C544956773 @default.
- W1830888947 hasConceptScore W1830888947C111368507 @default.
- W1830888947 hasConceptScore W1830888947C113196181 @default.
- W1830888947 hasConceptScore W1830888947C127313418 @default.
- W1830888947 hasConceptScore W1830888947C127413603 @default.
- W1830888947 hasConceptScore W1830888947C133386390 @default.
- W1830888947 hasConceptScore W1830888947C159985019 @default.
- W1830888947 hasConceptScore W1830888947C171250308 @default.
- W1830888947 hasConceptScore W1830888947C175708663 @default.
- W1830888947 hasConceptScore W1830888947C178790620 @default.
- W1830888947 hasConceptScore W1830888947C185592680 @default.
- W1830888947 hasConceptScore W1830888947C19067145 @default.
- W1830888947 hasConceptScore W1830888947C191897082 @default.
- W1830888947 hasConceptScore W1830888947C192562407 @default.
- W1830888947 hasConceptScore W1830888947C2777289219 @default.
- W1830888947 hasConceptScore W1830888947C2777431650 @default.
- W1830888947 hasConceptScore W1830888947C2779105228 @default.
- W1830888947 hasConceptScore W1830888947C2779851234 @default.
- W1830888947 hasConceptScore W1830888947C36759035 @default.
- W1830888947 hasConceptScore W1830888947C42360764 @default.
- W1830888947 hasConceptScore W1830888947C49040817 @default.
- W1830888947 hasConceptScore W1830888947C513153333 @default.
- W1830888947 hasConceptScore W1830888947C537208039 @default.
- W1830888947 hasConceptScore W1830888947C544956773 @default.
- W1830888947 hasLocation W18308889471 @default.
- W1830888947 hasOpenAccess W1830888947 @default.
- W1830888947 hasPrimaryLocation W18308889471 @default.
- W1830888947 hasRelatedWork W14006786 @default.
- W1830888947 hasRelatedWork W15661710 @default.
- W1830888947 hasRelatedWork W16232275 @default.
- W1830888947 hasRelatedWork W26440438 @default.
- W1830888947 hasRelatedWork W32285903 @default.
- W1830888947 hasRelatedWork W35878241 @default.
- W1830888947 hasRelatedWork W3992793 @default.
- W1830888947 hasRelatedWork W44603610 @default.
- W1830888947 hasRelatedWork W45029489 @default.
- W1830888947 hasRelatedWork W6184005 @default.
- W1830888947 isParatext "false" @default.
- W1830888947 isRetracted "false" @default.
- W1830888947 magId "1830888947" @default.
- W1830888947 workType "article" @default.