Matches in SemOpenAlex for { <https://semopenalex.org/work/W1831096910> ?p ?o ?g. }
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- W1831096910 endingPage "320" @default.
- W1831096910 startingPage "316" @default.
- W1831096910 abstract "The precise knowledge of the amount and the location in depth of inactive phosphorus in an n-type emitter is still a challenge. As a new approach, we determine the total amount of phosphorus (P dose) in the emitter stepwise in dependence of etching depth with the characterization tool ICP-OES. A comparison of the data with the electrically active P concentration profile measured by ECV allows to determine in which depths electrically inactive phosphorus is present. For a highly doped emitter, we show that most of the inactive P dose is located next to the sample surface. Furthermore, we compare the determined P dose in dependence of depth with the P dose extracted from a SIMS profile. In a second experiment, we investigate the amount of inactive phosphorus in the whole emitter for various n-type emitters, depending on the POCl3-N2 gas flow as a significant diffusion parameter. It is shown that an increase of the POCl3-N2 gas flow results in a saturation effect of the active phosphorus, while the amount of inactive phosphorus is strongly increasing." @default.
- W1831096910 created "2016-06-24" @default.
- W1831096910 creator A5029012685 @default.
- W1831096910 creator A5054656516 @default.
- W1831096910 creator A5074977563 @default.
- W1831096910 creator A5076593855 @default.
- W1831096910 date "2015-08-01" @default.
- W1831096910 modified "2023-09-27" @default.
- W1831096910 title "New Method for Determination of Electrically Inactive Phosphorus in n-type Emitters" @default.
- W1831096910 cites W105436113 @default.
- W1831096910 cites W1992546967 @default.
- W1831096910 cites W2024808868 @default.
- W1831096910 cites W2047602187 @default.
- W1831096910 cites W2146911294 @default.
- W1831096910 cites W2165150390 @default.
- W1831096910 doi "https://doi.org/10.1016/j.egypro.2015.07.045" @default.
- W1831096910 hasPublicationYear "2015" @default.
- W1831096910 type Work @default.
- W1831096910 sameAs 1831096910 @default.
- W1831096910 citedByCount "6" @default.
- W1831096910 countsByYear W18310969102016 @default.
- W1831096910 countsByYear W18310969102017 @default.
- W1831096910 countsByYear W18310969102018 @default.
- W1831096910 countsByYear W18310969102019 @default.
- W1831096910 crossrefType "journal-article" @default.
- W1831096910 hasAuthorship W1831096910A5029012685 @default.
- W1831096910 hasAuthorship W1831096910A5054656516 @default.
- W1831096910 hasAuthorship W1831096910A5074977563 @default.
- W1831096910 hasAuthorship W1831096910A5076593855 @default.
- W1831096910 hasBestOaLocation W18310969101 @default.
- W1831096910 hasConcept C100460472 @default.
- W1831096910 hasConcept C107872376 @default.
- W1831096910 hasConcept C113196181 @default.
- W1831096910 hasConcept C114614502 @default.
- W1831096910 hasConcept C119599485 @default.
- W1831096910 hasConcept C121332964 @default.
- W1831096910 hasConcept C127413603 @default.
- W1831096910 hasConcept C155891486 @default.
- W1831096910 hasConcept C165801399 @default.
- W1831096910 hasConcept C171250308 @default.
- W1831096910 hasConcept C178790620 @default.
- W1831096910 hasConcept C185592680 @default.
- W1831096910 hasConcept C192562407 @default.
- W1831096910 hasConcept C2779227376 @default.
- W1831096910 hasConcept C33923547 @default.
- W1831096910 hasConcept C46918542 @default.
- W1831096910 hasConcept C49040817 @default.
- W1831096910 hasConcept C510538283 @default.
- W1831096910 hasConcept C69357855 @default.
- W1831096910 hasConcept C97355855 @default.
- W1831096910 hasConcept C9930424 @default.
- W1831096910 hasConceptScore W1831096910C100460472 @default.
- W1831096910 hasConceptScore W1831096910C107872376 @default.
- W1831096910 hasConceptScore W1831096910C113196181 @default.
- W1831096910 hasConceptScore W1831096910C114614502 @default.
- W1831096910 hasConceptScore W1831096910C119599485 @default.
- W1831096910 hasConceptScore W1831096910C121332964 @default.
- W1831096910 hasConceptScore W1831096910C127413603 @default.
- W1831096910 hasConceptScore W1831096910C155891486 @default.
- W1831096910 hasConceptScore W1831096910C165801399 @default.
- W1831096910 hasConceptScore W1831096910C171250308 @default.
- W1831096910 hasConceptScore W1831096910C178790620 @default.
- W1831096910 hasConceptScore W1831096910C185592680 @default.
- W1831096910 hasConceptScore W1831096910C192562407 @default.
- W1831096910 hasConceptScore W1831096910C2779227376 @default.
- W1831096910 hasConceptScore W1831096910C33923547 @default.
- W1831096910 hasConceptScore W1831096910C46918542 @default.
- W1831096910 hasConceptScore W1831096910C49040817 @default.
- W1831096910 hasConceptScore W1831096910C510538283 @default.
- W1831096910 hasConceptScore W1831096910C69357855 @default.
- W1831096910 hasConceptScore W1831096910C97355855 @default.
- W1831096910 hasConceptScore W1831096910C9930424 @default.
- W1831096910 hasLocation W18310969101 @default.
- W1831096910 hasLocation W18310969102 @default.
- W1831096910 hasOpenAccess W1831096910 @default.
- W1831096910 hasPrimaryLocation W18310969101 @default.
- W1831096910 hasRelatedWork W146701134 @default.
- W1831096910 hasRelatedWork W1977383511 @default.
- W1831096910 hasRelatedWork W1981511393 @default.
- W1831096910 hasRelatedWork W1989332603 @default.
- W1831096910 hasRelatedWork W2053618428 @default.
- W1831096910 hasRelatedWork W2061267557 @default.
- W1831096910 hasRelatedWork W2066411212 @default.
- W1831096910 hasRelatedWork W2104012317 @default.
- W1831096910 hasRelatedWork W2132124185 @default.
- W1831096910 hasRelatedWork W58690174 @default.
- W1831096910 hasVolume "77" @default.
- W1831096910 isParatext "false" @default.
- W1831096910 isRetracted "false" @default.
- W1831096910 magId "1831096910" @default.
- W1831096910 workType "article" @default.