Matches in SemOpenAlex for { <https://semopenalex.org/work/W1831785206> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1831785206 abstract "The authors describe a WSi/sub x/ process using SiH/sub 2/Cl/sub 2/ chemistry, which is characterized by higher deposition rate, better film adhesion and integrity on polysilicon, and lower impurity concentration compared to the conventional SiH/sub 4/ chemistry. The nonselective W process (WF/sub 6/+H/sub 2/) developed for deposition on dielectric material is characterized by simplicity, excellent adhesion, and low resistivity without the need for a sticking layer. A selective W process (WF/sub 6/+H/sub 2/) developed for TiSi/sub 2/ contacts is characterized by high deposition rate, low contact resistance, low junction leakage, no lateral encroachment, and no silicon consumption in the vertical direction. The problems of silicon consumption and lateral encroachment associated with the tungsten deposition by hydrogen reduction is eliminated by the use of silane reduction. The silane reduction also leads to high deposition rates at low temperatures suitable for W deposition on aluminum layers. Blanket W deposition using silane reduction has good step coverage. >" @default.
- W1831785206 created "2016-06-24" @default.
- W1831785206 creator A5012781047 @default.
- W1831785206 creator A5013778060 @default.
- W1831785206 creator A5022845362 @default.
- W1831785206 creator A5025086506 @default.
- W1831785206 creator A5067919713 @default.
- W1831785206 date "2003-01-07" @default.
- W1831785206 modified "2023-09-25" @default.
- W1831785206 title "CVD tungsten and tungsten silicide for multilevel metallization" @default.
- W1831785206 cites W2078600997 @default.
- W1831785206 cites W2993800301 @default.
- W1831785206 doi "https://doi.org/10.1109/vtsa.1989.68583" @default.
- W1831785206 hasPublicationYear "2003" @default.
- W1831785206 type Work @default.
- W1831785206 sameAs 1831785206 @default.
- W1831785206 citedByCount "0" @default.
- W1831785206 crossrefType "proceedings-article" @default.
- W1831785206 hasAuthorship W1831785206A5012781047 @default.
- W1831785206 hasAuthorship W1831785206A5013778060 @default.
- W1831785206 hasAuthorship W1831785206A5022845362 @default.
- W1831785206 hasAuthorship W1831785206A5025086506 @default.
- W1831785206 hasAuthorship W1831785206A5067919713 @default.
- W1831785206 hasConcept C113196181 @default.
- W1831785206 hasConcept C127413603 @default.
- W1831785206 hasConcept C151730666 @default.
- W1831785206 hasConcept C159985019 @default.
- W1831785206 hasConcept C171250308 @default.
- W1831785206 hasConcept C178790620 @default.
- W1831785206 hasConcept C185592680 @default.
- W1831785206 hasConcept C191897082 @default.
- W1831785206 hasConcept C192562407 @default.
- W1831785206 hasConcept C2778024649 @default.
- W1831785206 hasConcept C2779227376 @default.
- W1831785206 hasConcept C2780901251 @default.
- W1831785206 hasConcept C2816523 @default.
- W1831785206 hasConcept C42360764 @default.
- W1831785206 hasConcept C43617362 @default.
- W1831785206 hasConcept C542268612 @default.
- W1831785206 hasConcept C544956773 @default.
- W1831785206 hasConcept C57410435 @default.
- W1831785206 hasConcept C64297162 @default.
- W1831785206 hasConcept C69544855 @default.
- W1831785206 hasConcept C71987851 @default.
- W1831785206 hasConcept C86803240 @default.
- W1831785206 hasConceptScore W1831785206C113196181 @default.
- W1831785206 hasConceptScore W1831785206C127413603 @default.
- W1831785206 hasConceptScore W1831785206C151730666 @default.
- W1831785206 hasConceptScore W1831785206C159985019 @default.
- W1831785206 hasConceptScore W1831785206C171250308 @default.
- W1831785206 hasConceptScore W1831785206C178790620 @default.
- W1831785206 hasConceptScore W1831785206C185592680 @default.
- W1831785206 hasConceptScore W1831785206C191897082 @default.
- W1831785206 hasConceptScore W1831785206C192562407 @default.
- W1831785206 hasConceptScore W1831785206C2778024649 @default.
- W1831785206 hasConceptScore W1831785206C2779227376 @default.
- W1831785206 hasConceptScore W1831785206C2780901251 @default.
- W1831785206 hasConceptScore W1831785206C2816523 @default.
- W1831785206 hasConceptScore W1831785206C42360764 @default.
- W1831785206 hasConceptScore W1831785206C43617362 @default.
- W1831785206 hasConceptScore W1831785206C542268612 @default.
- W1831785206 hasConceptScore W1831785206C544956773 @default.
- W1831785206 hasConceptScore W1831785206C57410435 @default.
- W1831785206 hasConceptScore W1831785206C64297162 @default.
- W1831785206 hasConceptScore W1831785206C69544855 @default.
- W1831785206 hasConceptScore W1831785206C71987851 @default.
- W1831785206 hasConceptScore W1831785206C86803240 @default.
- W1831785206 hasLocation W18317852061 @default.
- W1831785206 hasOpenAccess W1831785206 @default.
- W1831785206 hasPrimaryLocation W18317852061 @default.
- W1831785206 hasRelatedWork W1490265544 @default.
- W1831785206 hasRelatedWork W1965930445 @default.
- W1831785206 hasRelatedWork W1985684458 @default.
- W1831785206 hasRelatedWork W2035633810 @default.
- W1831785206 hasRelatedWork W2040808452 @default.
- W1831785206 hasRelatedWork W2089246282 @default.
- W1831785206 hasRelatedWork W2105983831 @default.
- W1831785206 hasRelatedWork W2108836005 @default.
- W1831785206 hasRelatedWork W2123435124 @default.
- W1831785206 hasRelatedWork W2148781836 @default.
- W1831785206 hasRelatedWork W2154137840 @default.
- W1831785206 hasRelatedWork W2162886553 @default.
- W1831785206 hasRelatedWork W2163777241 @default.
- W1831785206 hasRelatedWork W2470452055 @default.
- W1831785206 hasRelatedWork W2538867828 @default.
- W1831785206 hasRelatedWork W2540570898 @default.
- W1831785206 hasRelatedWork W2544758754 @default.
- W1831785206 hasRelatedWork W1583073523 @default.
- W1831785206 hasRelatedWork W2521735849 @default.
- W1831785206 hasRelatedWork W2739678175 @default.
- W1831785206 isParatext "false" @default.
- W1831785206 isRetracted "false" @default.
- W1831785206 magId "1831785206" @default.
- W1831785206 workType "article" @default.