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- W183294532 abstract "As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties. Therefore, a part of the electrical energy stored in the capacitor is converted into mechanical energy." @default.
- W183294532 created "2016-06-24" @default.
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- W183294532 date "2010-01-01" @default.
- W183294532 modified "2023-10-02" @default.
- W183294532 title "Quartz and MEM Resonators" @default.
- W183294532 cites W2029681412 @default.
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- W183294532 doi "https://doi.org/10.1007/978-90-481-9395-0_2" @default.
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