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- W18356120 abstract "The main advantages of the vapor phase epitaxy (VPE) are the ability to grow very good quality layers, with high growth rate (higher than μm min –1). Its principle is relatively simple and allows great flexibility (change in doping level or type of doping …). In addition, the VPE can handle several large wafers, which is particularly desirable for photovoltaic applications. In this chapter, we introduce the principle of this method before discussing the theories and modeling for understanding the mechanisms governing the kinetics of crystal growth. It is followed by a detailed description of SiH2Cl2/H2 system, well adapted to the growth of films for photovoltaic applications." @default.
- W18356120 created "2016-06-24" @default.
- W18356120 creator A5054880661 @default.
- W18356120 date "2009-01-01" @default.
- W18356120 modified "2023-09-26" @default.
- W18356120 title "Vapor Phase Epitaxy" @default.
- W18356120 cites W1977228537 @default.
- W18356120 cites W1978870036 @default.
- W18356120 cites W1995832522 @default.
- W18356120 cites W1999710456 @default.
- W18356120 cites W2003293269 @default.
- W18356120 cites W2008839091 @default.
- W18356120 cites W2025349697 @default.
- W18356120 cites W2036001131 @default.
- W18356120 cites W2036051838 @default.
- W18356120 cites W2036289452 @default.
- W18356120 cites W2046152050 @default.
- W18356120 cites W2086162749 @default.
- W18356120 cites W2092498615 @default.
- W18356120 cites W2094903000 @default.
- W18356120 cites W4234760209 @default.
- W18356120 doi "https://doi.org/10.1007/978-3-642-02044-5_10" @default.
- W18356120 hasPublicationYear "2009" @default.
- W18356120 type Work @default.
- W18356120 sameAs 18356120 @default.
- W18356120 citedByCount "0" @default.
- W18356120 crossrefType "book-chapter" @default.
- W18356120 hasAuthorship W18356120A5054880661 @default.
- W18356120 hasConcept C105795698 @default.
- W18356120 hasConcept C110738630 @default.
- W18356120 hasConcept C119599485 @default.
- W18356120 hasConcept C121332964 @default.
- W18356120 hasConcept C127413603 @default.
- W18356120 hasConcept C160671074 @default.
- W18356120 hasConcept C171250308 @default.
- W18356120 hasConcept C178790620 @default.
- W18356120 hasConcept C185592680 @default.
- W18356120 hasConcept C192562407 @default.
- W18356120 hasConcept C2779227376 @default.
- W18356120 hasConcept C2780598303 @default.
- W18356120 hasConcept C3018640491 @default.
- W18356120 hasConcept C33923547 @default.
- W18356120 hasConcept C41008148 @default.
- W18356120 hasConcept C41291067 @default.
- W18356120 hasConcept C44280652 @default.
- W18356120 hasConcept C49040817 @default.
- W18356120 hasConcept C57863236 @default.
- W18356120 hasConcept C61696701 @default.
- W18356120 hasConcept C97355855 @default.
- W18356120 hasConceptScore W18356120C105795698 @default.
- W18356120 hasConceptScore W18356120C110738630 @default.
- W18356120 hasConceptScore W18356120C119599485 @default.
- W18356120 hasConceptScore W18356120C121332964 @default.
- W18356120 hasConceptScore W18356120C127413603 @default.
- W18356120 hasConceptScore W18356120C160671074 @default.
- W18356120 hasConceptScore W18356120C171250308 @default.
- W18356120 hasConceptScore W18356120C178790620 @default.
- W18356120 hasConceptScore W18356120C185592680 @default.
- W18356120 hasConceptScore W18356120C192562407 @default.
- W18356120 hasConceptScore W18356120C2779227376 @default.
- W18356120 hasConceptScore W18356120C2780598303 @default.
- W18356120 hasConceptScore W18356120C3018640491 @default.
- W18356120 hasConceptScore W18356120C33923547 @default.
- W18356120 hasConceptScore W18356120C41008148 @default.
- W18356120 hasConceptScore W18356120C41291067 @default.
- W18356120 hasConceptScore W18356120C44280652 @default.
- W18356120 hasConceptScore W18356120C49040817 @default.
- W18356120 hasConceptScore W18356120C57863236 @default.
- W18356120 hasConceptScore W18356120C61696701 @default.
- W18356120 hasConceptScore W18356120C97355855 @default.
- W18356120 hasLocation W183561201 @default.
- W18356120 hasOpenAccess W18356120 @default.
- W18356120 hasPrimaryLocation W183561201 @default.
- W18356120 hasRelatedWork W1470767743 @default.
- W18356120 hasRelatedWork W1585622107 @default.
- W18356120 hasRelatedWork W1979547115 @default.
- W18356120 hasRelatedWork W1980536921 @default.
- W18356120 hasRelatedWork W1990974451 @default.
- W18356120 hasRelatedWork W1994693684 @default.
- W18356120 hasRelatedWork W2007725006 @default.
- W18356120 hasRelatedWork W2026686533 @default.
- W18356120 hasRelatedWork W2094543209 @default.
- W18356120 hasRelatedWork W2138671477 @default.
- W18356120 hasRelatedWork W2588058801 @default.
- W18356120 hasRelatedWork W2776726734 @default.
- W18356120 hasRelatedWork W2894471407 @default.
- W18356120 hasRelatedWork W2965903383 @default.
- W18356120 hasRelatedWork W3000015945 @default.
- W18356120 hasRelatedWork W313591759 @default.
- W18356120 hasRelatedWork W51860822 @default.
- W18356120 hasRelatedWork W578148732 @default.
- W18356120 hasRelatedWork W93453052 @default.
- W18356120 hasRelatedWork W93933765 @default.
- W18356120 isParatext "false" @default.
- W18356120 isRetracted "false" @default.
- W18356120 magId "18356120" @default.
- W18356120 workType "book-chapter" @default.