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• W1836372730 abstract "This paper presents the derivation of a 17-sample phase-shifting algorithm that can compensate the miscalibration and first-order nonlinearity of phase shift error, coupling error, and bias modulation of the intensity and satisfy the fringe contrast maximum condition. The phase error of measurements performed using the 17-sample algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the optical thickness variation of a BK7 optically transparent plate obtained using a wavelength tuning Fizeau interferometer and the 17-sample algorithm are presented. The experimental results indicate that the optical thickness variation measurement accuracy for the BK7 plate was 3 nm." @default.
• W1836372730 created "2016-06-24" @default.
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• W1836372730 date "2015-08-21" @default.
• W1836372730 modified "2023-10-04" @default.
• W1836372730 title "Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry" @default.
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• W1836372730 doi "https://doi.org/10.1364/oe.23.022928" @default.
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