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- W1838045248 abstract "A blind mask and a simplified-blind (S-blind) mask proposed for phase shifting lithography are discussed. They both have very simple structures. Both the blind and S-blind methods are very effective in solving the bridging problem in single-layer-shifter phase-shifting lithography. These phase-shifting methods are suitable for 0.3- mu m lithography for the manufacture of 64-Mb DRAMs. >" @default.
- W1838045248 created "2016-06-24" @default.
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- W1838045248 date "1992-01-01" @default.
- W1838045248 modified "2023-09-26" @default.
- W1838045248 title "Application of blind method to phase-shifting lithography" @default.
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- W1838045248 doi "https://doi.org/10.1109/vlsit.1992.200674" @default.
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