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- W1838678061 abstract "In SF6-18O2 discharges, mass spectrometric studies have clearly shown the presence of S2F and S2F2 molecules in the case of the use of fluorine consuming materials. Reaction schemes are proposed to explain the formation of S2F and S2F2 molecules. These reaction paths also lead to the S2 molecule." @default.
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- W1838678061 date "1991-07-14" @default.
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- W1838678061 title "Mass spectrometric detection of S<sub>2</sub>F and S<sub>2</sub>F<sub>2</sub>in SF<sub>6</sub>-<sup>18</sup>O<sub>2</sub>RF discharges" @default.
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- W1838678061 doi "https://doi.org/10.1088/0022-3727/24/7/011" @default.
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