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- W1839944868 endingPage "1568" @default.
- W1839944868 startingPage "1565" @default.
- W1839944868 abstract "Abstract Recently, we succeeded in demonstrating an oxide TFT consisting of a channel layer (IGZO) and gate insulator (AlO x ) continuously fabricated by non‐vacuum mist CVD. In this report, each thin film and the interfaces of the films have been improved with ozone (O 3 ) assistance, as the initial oxide TFT had poor characteristics compared with those of the IGZO TFT fabricated by the conventional vacuum process. A superhydrophilic interface between AlO x and IGZO was obtained by removing the adhered organic matter from the film surface. The breakdown fields ( E BD ) and dielectric constant ( κ ) of the AlO x thin films were improved from 6 to 8 MV/cm and from 6 to 7, respectively, and the carrier concentration of the IGZO thin film decreased from 10 19 to 10 16 cm –3 . The oxide TFT exhibited field effect mobility ( μ lin ) of 8.7 cm 2 /(Vs), sub‐threshold slope ( S ) of around 0.3 V/dec. and hysteresis ( ΔV H ) of around 0.5 V. These values were obtained by improving each thin film and the interfaces of the films with O 3 assistance. This result is an important first step toward non‐vacuum oxide TFT fabrication processes. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W1839944868 created "2016-06-24" @default.
- W1839944868 creator A5004480924 @default.
- W1839944868 creator A5046446439 @default.
- W1839944868 creator A5053229906 @default.
- W1839944868 creator A5054529674 @default.
- W1839944868 creator A5061695845 @default.
- W1839944868 date "2013-10-07" @default.
- W1839944868 modified "2023-10-14" @default.
- W1839944868 title "Enhancing carrier mobility of IGZO TFT fabricated by non‐vacuum mist CVD with O <sub>3</sub> assistance" @default.
- W1839944868 doi "https://doi.org/10.1002/pssc.201300247" @default.
- W1839944868 hasPublicationYear "2013" @default.
- W1839944868 type Work @default.
- W1839944868 sameAs 1839944868 @default.
- W1839944868 citedByCount "16" @default.
- W1839944868 countsByYear W18399448682014 @default.
- W1839944868 countsByYear W18399448682015 @default.
- W1839944868 countsByYear W18399448682016 @default.
- W1839944868 countsByYear W18399448682017 @default.
- W1839944868 countsByYear W18399448682018 @default.
- W1839944868 countsByYear W18399448682019 @default.
- W1839944868 countsByYear W18399448682020 @default.
- W1839944868 countsByYear W18399448682022 @default.
- W1839944868 countsByYear W18399448682023 @default.
- W1839944868 crossrefType "journal-article" @default.
- W1839944868 hasAuthorship W1839944868A5004480924 @default.
- W1839944868 hasAuthorship W1839944868A5046446439 @default.
- W1839944868 hasAuthorship W1839944868A5053229906 @default.
- W1839944868 hasAuthorship W1839944868A5054529674 @default.
- W1839944868 hasAuthorship W1839944868A5061695845 @default.
- W1839944868 hasConcept C121332964 @default.
- W1839944868 hasConcept C123299182 @default.
- W1839944868 hasConcept C133386390 @default.
- W1839944868 hasConcept C136525101 @default.
- W1839944868 hasConcept C142724271 @default.
- W1839944868 hasConcept C153294291 @default.
- W1839944868 hasConcept C162743726 @default.
- W1839944868 hasConcept C171250308 @default.
- W1839944868 hasConcept C19067145 @default.
- W1839944868 hasConcept C191897082 @default.
- W1839944868 hasConcept C192562407 @default.
- W1839944868 hasConcept C204787440 @default.
- W1839944868 hasConcept C26873012 @default.
- W1839944868 hasConcept C2779227376 @default.
- W1839944868 hasConcept C2779851234 @default.
- W1839944868 hasConcept C31500677 @default.
- W1839944868 hasConcept C49040817 @default.
- W1839944868 hasConcept C6831451 @default.
- W1839944868 hasConcept C71924100 @default.
- W1839944868 hasConcept C87359718 @default.
- W1839944868 hasConceptScore W1839944868C121332964 @default.
- W1839944868 hasConceptScore W1839944868C123299182 @default.
- W1839944868 hasConceptScore W1839944868C133386390 @default.
- W1839944868 hasConceptScore W1839944868C136525101 @default.
- W1839944868 hasConceptScore W1839944868C142724271 @default.
- W1839944868 hasConceptScore W1839944868C153294291 @default.
- W1839944868 hasConceptScore W1839944868C162743726 @default.
- W1839944868 hasConceptScore W1839944868C171250308 @default.
- W1839944868 hasConceptScore W1839944868C19067145 @default.
- W1839944868 hasConceptScore W1839944868C191897082 @default.
- W1839944868 hasConceptScore W1839944868C192562407 @default.
- W1839944868 hasConceptScore W1839944868C204787440 @default.
- W1839944868 hasConceptScore W1839944868C26873012 @default.
- W1839944868 hasConceptScore W1839944868C2779227376 @default.
- W1839944868 hasConceptScore W1839944868C2779851234 @default.
- W1839944868 hasConceptScore W1839944868C31500677 @default.
- W1839944868 hasConceptScore W1839944868C49040817 @default.
- W1839944868 hasConceptScore W1839944868C6831451 @default.
- W1839944868 hasConceptScore W1839944868C71924100 @default.
- W1839944868 hasConceptScore W1839944868C87359718 @default.
- W1839944868 hasIssue "11" @default.
- W1839944868 hasLocation W18399448681 @default.
- W1839944868 hasOpenAccess W1839944868 @default.
- W1839944868 hasPrimaryLocation W18399448681 @default.
- W1839944868 hasRelatedWork W1975403883 @default.
- W1839944868 hasRelatedWork W1977029621 @default.
- W1839944868 hasRelatedWork W1983553895 @default.
- W1839944868 hasRelatedWork W2116088288 @default.
- W1839944868 hasRelatedWork W2130295098 @default.
- W1839944868 hasRelatedWork W2312969497 @default.
- W1839944868 hasRelatedWork W2513959171 @default.
- W1839944868 hasRelatedWork W2898695502 @default.
- W1839944868 hasRelatedWork W2979498455 @default.
- W1839944868 hasRelatedWork W4313240740 @default.
- W1839944868 hasVolume "10" @default.
- W1839944868 isParatext "false" @default.
- W1839944868 isRetracted "false" @default.
- W1839944868 magId "1839944868" @default.
- W1839944868 workType "article" @default.