Matches in SemOpenAlex for { <https://semopenalex.org/work/W1840392896> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W1840392896 abstract "This paper presents an SOI iMEMS intelligent pressure sensor operation on a circular-shape diaphragm and its design which involves determining the target position for placing the transducer on the diaphragm through stress analyses based on various dimensional SOI structures along with a bulk Si one, including thermal residual stresses. Further, it proposes a way of integrating the sensor macros with a microprocessor as a monolithic chip solution. Piezoresistance in silicon is changed by conductivity of a material in response to an applied stresses on various structures at maximum stress point at various pressures. Based on transducer analysis, the sensitivity parameters for the transducer operation and their limiting factors are concisely summarized, where simulated results for the normal and shear stresses with piezoresistance coefficients are given." @default.
- W1840392896 created "2016-06-24" @default.
- W1840392896 creator A5018855856 @default.
- W1840392896 creator A5058678792 @default.
- W1840392896 date "2002-11-22" @default.
- W1840392896 modified "2023-09-26" @default.
- W1840392896 title "A high density circular-shape SOI iMEMS with intelligent pressure sensor" @default.
- W1840392896 cites W1998008563 @default.
- W1840392896 cites W2038667420 @default.
- W1840392896 doi "https://doi.org/10.1109/soi.1997.634930" @default.
- W1840392896 hasPublicationYear "2002" @default.
- W1840392896 type Work @default.
- W1840392896 sameAs 1840392896 @default.
- W1840392896 citedByCount "0" @default.
- W1840392896 crossrefType "proceedings-article" @default.
- W1840392896 hasAuthorship W1840392896A5018855856 @default.
- W1840392896 hasAuthorship W1840392896A5058678792 @default.
- W1840392896 hasConcept C119599485 @default.
- W1840392896 hasConcept C121332964 @default.
- W1840392896 hasConcept C127413603 @default.
- W1840392896 hasConcept C159985019 @default.
- W1840392896 hasConcept C164292776 @default.
- W1840392896 hasConcept C165005293 @default.
- W1840392896 hasConcept C192562407 @default.
- W1840392896 hasConcept C198394728 @default.
- W1840392896 hasConcept C21200559 @default.
- W1840392896 hasConcept C24326235 @default.
- W1840392896 hasConcept C24890656 @default.
- W1840392896 hasConcept C37292000 @default.
- W1840392896 hasConcept C41325743 @default.
- W1840392896 hasConcept C49040817 @default.
- W1840392896 hasConcept C53143962 @default.
- W1840392896 hasConcept C544956773 @default.
- W1840392896 hasConcept C56318395 @default.
- W1840392896 hasConcept C78519656 @default.
- W1840392896 hasConceptScore W1840392896C119599485 @default.
- W1840392896 hasConceptScore W1840392896C121332964 @default.
- W1840392896 hasConceptScore W1840392896C127413603 @default.
- W1840392896 hasConceptScore W1840392896C159985019 @default.
- W1840392896 hasConceptScore W1840392896C164292776 @default.
- W1840392896 hasConceptScore W1840392896C165005293 @default.
- W1840392896 hasConceptScore W1840392896C192562407 @default.
- W1840392896 hasConceptScore W1840392896C198394728 @default.
- W1840392896 hasConceptScore W1840392896C21200559 @default.
- W1840392896 hasConceptScore W1840392896C24326235 @default.
- W1840392896 hasConceptScore W1840392896C24890656 @default.
- W1840392896 hasConceptScore W1840392896C37292000 @default.
- W1840392896 hasConceptScore W1840392896C41325743 @default.
- W1840392896 hasConceptScore W1840392896C49040817 @default.
- W1840392896 hasConceptScore W1840392896C53143962 @default.
- W1840392896 hasConceptScore W1840392896C544956773 @default.
- W1840392896 hasConceptScore W1840392896C56318395 @default.
- W1840392896 hasConceptScore W1840392896C78519656 @default.
- W1840392896 hasLocation W18403928961 @default.
- W1840392896 hasOpenAccess W1840392896 @default.
- W1840392896 hasPrimaryLocation W18403928961 @default.
- W1840392896 hasRelatedWork W1483840017 @default.
- W1840392896 hasRelatedWork W1527364888 @default.
- W1840392896 hasRelatedWork W1869985055 @default.
- W1840392896 hasRelatedWork W2007728792 @default.
- W1840392896 hasRelatedWork W2039507537 @default.
- W1840392896 hasRelatedWork W2068974081 @default.
- W1840392896 hasRelatedWork W2076467392 @default.
- W1840392896 hasRelatedWork W2105294155 @default.
- W1840392896 hasRelatedWork W2127021534 @default.
- W1840392896 hasRelatedWork W2128718882 @default.
- W1840392896 hasRelatedWork W2141727737 @default.
- W1840392896 hasRelatedWork W2166884695 @default.
- W1840392896 hasRelatedWork W2331673616 @default.
- W1840392896 hasRelatedWork W2547077463 @default.
- W1840392896 hasRelatedWork W2550958505 @default.
- W1840392896 hasRelatedWork W2780081917 @default.
- W1840392896 hasRelatedWork W2791268694 @default.
- W1840392896 hasRelatedWork W2912682349 @default.
- W1840392896 hasRelatedWork W2917243580 @default.
- W1840392896 hasRelatedWork W2917952304 @default.
- W1840392896 isParatext "false" @default.
- W1840392896 isRetracted "false" @default.
- W1840392896 magId "1840392896" @default.
- W1840392896 workType "article" @default.