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- W184057997 endingPage "481" @default.
- W184057997 startingPage "441" @default.
- W184057997 abstract "Abstract Selective area growth (SAG) is a fabrication technique that allows compound semiconductor crystals to grow within laterally defined regions with feature sizes down to submicron to even nanometer scale. In masked SAG, dielectric masks formed by lithography are used to inhibit crystal growth outside the window areas. In this chapter, we provide a brief historical account of the development of SAG technology, a detailed description of the SAG mechanism, and some important applications to illustrate the power of SAG. We cover many essential factors that contribute to the growth dynamics of SAG, including the growth modes, the governing parameters in metal–organic chemical vapor deposition systems that determine the growth process, and diffusion processes that are directly responsible for growth rate enhancement and selectivity. A theoretical model based on vapor-phase diffusion is presented to elucidate the detailed growth kinetics and to predict the final growth profile accurately. Results from this model agree excellently with experimental data. To illustrate the power of SAG, we show three examples on how to use this technique to create a photonic integrated circuit, a novel material system, and a hybrid integrated device with active III–V materials growing on a silicon platform." @default.
- W184057997 created "2016-06-24" @default.
- W184057997 creator A5014428007 @default.
- W184057997 creator A5020494343 @default.
- W184057997 creator A5075432034 @default.
- W184057997 date "2015-01-01" @default.
- W184057997 modified "2023-10-16" @default.
- W184057997 title "Selective Area Masked Growth (Nano to Micro)" @default.
- W184057997 cites W1559924278 @default.
- W184057997 cites W1567707718 @default.
- W184057997 cites W1590779822 @default.
- W184057997 cites W1820307015 @default.
- W184057997 cites W1892088982 @default.
- W184057997 cites W1964114890 @default.
- W184057997 cites W1965270910 @default.
- W184057997 cites W1965935044 @default.
- W184057997 cites W1966475108 @default.
- W184057997 cites W1967417957 @default.
- W184057997 cites W1969123278 @default.
- W184057997 cites W1969798766 @default.
- W184057997 cites W1970792889 @default.
- W184057997 cites W1971007704 @default.
- W184057997 cites W1972391026 @default.
- W184057997 cites W1972946645 @default.
- W184057997 cites W1973263822 @default.
- W184057997 cites W1975784900 @default.
- W184057997 cites W1976725302 @default.
- W184057997 cites W1978096080 @default.
- W184057997 cites W1981426247 @default.
- W184057997 cites W1982813608 @default.
- W184057997 cites W1984860520 @default.
- W184057997 cites W1985248092 @default.
- W184057997 cites W1986113254 @default.
- W184057997 cites W1986406603 @default.
- W184057997 cites W1988464435 @default.
- W184057997 cites W1990014835 @default.
- W184057997 cites W1991511002 @default.
- W184057997 cites W1993228791 @default.
- W184057997 cites W1994471527 @default.
- W184057997 cites W1994483889 @default.
- W184057997 cites W1995469189 @default.
- W184057997 cites W1996100303 @default.
- W184057997 cites W2000743573 @default.
- W184057997 cites W2001554063 @default.
- W184057997 cites W2004464227 @default.
- W184057997 cites W2004849683 @default.
- W184057997 cites W2005060085 @default.
- W184057997 cites W2008183314 @default.
- W184057997 cites W2008995330 @default.
- W184057997 cites W2010222262 @default.
- W184057997 cites W2010475410 @default.
- W184057997 cites W2010903025 @default.
- W184057997 cites W2011597828 @default.
- W184057997 cites W2012100581 @default.
- W184057997 cites W2012868138 @default.
- W184057997 cites W2014455828 @default.
- W184057997 cites W2016910134 @default.
- W184057997 cites W2019243587 @default.
- W184057997 cites W2025595135 @default.
- W184057997 cites W2026576421 @default.
- W184057997 cites W2026837924 @default.
- W184057997 cites W2027296149 @default.
- W184057997 cites W2028225656 @default.
- W184057997 cites W2032679486 @default.
- W184057997 cites W2033906466 @default.
- W184057997 cites W2036154642 @default.
- W184057997 cites W2036401246 @default.
- W184057997 cites W2036876758 @default.
- W184057997 cites W2037131295 @default.
- W184057997 cites W2038215313 @default.
- W184057997 cites W2038593774 @default.
- W184057997 cites W2039606244 @default.
- W184057997 cites W2041002191 @default.
- W184057997 cites W2042003431 @default.
- W184057997 cites W2042660276 @default.
- W184057997 cites W2042808419 @default.
- W184057997 cites W2045868302 @default.
- W184057997 cites W2046006975 @default.
- W184057997 cites W2047096404 @default.
- W184057997 cites W2051664456 @default.
- W184057997 cites W2051958773 @default.
- W184057997 cites W2052313563 @default.
- W184057997 cites W2054443360 @default.
- W184057997 cites W2054980239 @default.
- W184057997 cites W2056184090 @default.
- W184057997 cites W2057656584 @default.
- W184057997 cites W2058288064 @default.
- W184057997 cites W2059755268 @default.
- W184057997 cites W2062619910 @default.
- W184057997 cites W2063746343 @default.
- W184057997 cites W2064284973 @default.
- W184057997 cites W2064964503 @default.
- W184057997 cites W2065649118 @default.
- W184057997 cites W2067081569 @default.
- W184057997 cites W2067274265 @default.
- W184057997 cites W2067518008 @default.
- W184057997 cites W2072501672 @default.
- W184057997 cites W2072546500 @default.