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• W1844351808 endingPage "6017" @default.
• W1844351808 startingPage "6013" @default.
• W1844351808 abstract "3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput." @default.
• W1844351808 created "2016-06-24" @default.
• W1844351808 creator A5023301889 @default.
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• W1844351808 date "2015-10-06" @default.
• W1844351808 modified "2023-10-06" @default.
• W1844351808 title "Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists" @default.
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• W1844351808 doi "https://doi.org/10.1002/smll.201500796" @default.
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