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• W1844951985 abstract "This chapter provides a combined introductory overview and historical survey of the development of laser processing of semiconductors. It focuses on various types of lasers used for laser processing, other energy beam sources for processing, and laser processing of materials other than semiconductors. In the past, the irradiation of materials with high-powered lasers could lead to heating and cooling rates several orders of magnitude greater than those obtained by other means. However, the utilization of this aspect of lasers was inhibited by the small areas over which uniform energy densities could be obtained with lasers available at that time. With the gradual improvement in laser technology and the development of techniques for scanning beams over large areas, the interest in lasers for heat treating to obtain metallurgical modifications of the microstructure of materials has grown rapidly. The chapter discusses laser processing of insulators, ceramics, and glasses for semiconductors." @default.
• W1844951985 created "2016-06-24" @default.
• W1844951985 creator A5037437747 @default.
• W1844951985 creator A5072542263 @default.
• W1844951985 creator A5089911516 @default.
• W1844951985 date "1984-01-01" @default.
• W1844951985 modified "2023-09-27" @default.
• W1844951985 title "Chapter 1 Laser Processing of Semiconductors: An Overview" @default.
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