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- W18477703 abstract "Initiated by the demand for improved depth resolution, we have carried out a series of depth profiling experiments at various angles of incidence between s = 0° and s = 85°, while maintaining a high primary beam energy, namely 12 keV. In order to reduce the experimental difficulties involved with high angles of incidence, we took advantage of our “mini-chip” sample preparation technique and our “checkerboard” data evaluation technique [1]." @default.
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- W18477703 date "1986-01-01" @default.
- W18477703 modified "2023-09-24" @default.
- W18477703 title "SIMS Depth Profiling with Oblique Primary Beam Incidence" @default.
- W18477703 cites W2000328535 @default.
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- W18477703 doi "https://doi.org/10.1007/978-3-642-82724-2_84" @default.
- W18477703 hasPublicationYear "1986" @default.
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