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- W1849707569 abstract "A unique, single-step damascene approach was used to form ferroelectric capacitors with noble metal electrodes. In this study an oxidized Si substrate was coated with a blanket W film and a patterned SiO/sub 2/ film. Capacitors were formed by conformal deposition of a sputtered bottom electrode structure (100 nm Ir/50 nm TiAlN), MOCVD ferroelectric (130 nm (Pb,Ca)ZrTiO/sub 3/), and sputtered top electrode (150 nm Ir). A halide-based slurry was used in a single multi-layer polish to define planar, recessed capacitors between 100/spl times/100 /spl mu/m/sup 2/ and 10/spl times/10 /spl mu/m/sup 2/. The Ir removal rate was 14 nm/minute. Annealed capacitors had ferroelectric and dielectric properties that were similar to conventionally processed capacitors. 2P/sub r/ and switched charge at 2V were found to be 42 /spl mu/C/cm/sup 2/ and 40 /spl mu/C/cm/sup 2/ respectively with a leakage current density of 10/sup -4/ A/cm/sup 2/ at 2V." @default.
- W1849707569 created "2016-06-24" @default.
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- W1849707569 date "2002-11-11" @default.
- W1849707569 modified "2023-09-26" @default.
- W1849707569 title "Damascene processing of ferroelectric capacitors" @default.
- W1849707569 cites W1893294433 @default.
- W1849707569 doi "https://doi.org/10.1109/isaf.2000.941550" @default.
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