FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1853430445> ?p ?o ?g. }

• W1853430445 abstract "The implementation and characterization of a high sensitivity silicon-on-insulator (SOI) capacitive microaccelerometer with sub-25 /spl mu/g resolution is presented. The in-plane accelerometers were fabricated on 40 /spl mu/m thick SOI substrates using a two-mask, dry-release low temperature process comprising of three plasma etching steps. The fabricated devices were interfaced with a high resolution, low noise and low power switched-capacitor integrated circuit (IC) fabricated in a 2.5 V 0.25 /spl mu/m N-well CMOS process. The measured sensitivity is 0.2 pF/g and the output noise floor is 20 /spl mu/g//spl radic/Hz. The total power consumption is 3 mW." @default.
• W1853430445 created "2016-06-24" @default.
• W1853430445 creator A5022358493 @default.
• W1853430445 creator A5037320630 @default.
• W1853430445 creator A5081523432 @default.
• W1853430445 date "2004-07-06" @default.
• W1853430445 modified "2023-09-25" @default.
• W1853430445 title "A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25 μm CMOS interface" @default.
• W1853430445 cites W2003469080 @default.
• W1853430445 cites W2104765787 @default.
• W1853430445 cites W2114766284 @default.
• W1853430445 cites W2149128480 @default.
• W1853430445 cites W2156446284 @default.
• W1853430445 cites W2164773376 @default.
• W1853430445 doi "https://doi.org/10.1109/mems.2004.1290649" @default.
• W1853430445 hasPublicationYear "2004" @default.
• W1853430445 type Work @default.
• W1853430445 sameAs 1853430445 @default.
• W1853430445 citedByCount "23" @default.
• W1853430445 countsByYear W18534304452012 @default.
• W1853430445 countsByYear W18534304452013 @default.
• W1853430445 countsByYear W18534304452015 @default.
• W1853430445 countsByYear W18534304452016 @default.
• W1853430445 countsByYear W18534304452019 @default.
• W1853430445 crossrefType "proceedings-article" @default.
• W1853430445 hasAuthorship W1853430445A5022358493 @default.
• W1853430445 hasAuthorship W1853430445A5037320630 @default.
• W1853430445 hasAuthorship W1853430445A5081523432 @default.
• W1853430445 hasConcept C100460472 @default.
• W1853430445 hasConcept C115961682 @default.
• W1853430445 hasConcept C117551214 @default.
• W1853430445 hasConcept C119599485 @default.
• W1853430445 hasConcept C121332964 @default.
• W1853430445 hasConcept C127413603 @default.
• W1853430445 hasConcept C154945302 @default.
• W1853430445 hasConcept C163258240 @default.
• W1853430445 hasConcept C165801399 @default.
• W1853430445 hasConcept C171250308 @default.
• W1853430445 hasConcept C192562407 @default.
• W1853430445 hasConcept C206755178 @default.
• W1853430445 hasConcept C21200559 @default.
• W1853430445 hasConcept C24326235 @default.
• W1853430445 hasConcept C2779227376 @default.
• W1853430445 hasConcept C2984118289 @default.
• W1853430445 hasConcept C41008148 @default.
• W1853430445 hasConcept C46362747 @default.
• W1853430445 hasConcept C49040817 @default.
• W1853430445 hasConcept C52192207 @default.
• W1853430445 hasConcept C53143962 @default.
• W1853430445 hasConcept C544956773 @default.
• W1853430445 hasConcept C62520636 @default.
• W1853430445 hasConcept C89805583 @default.
• W1853430445 hasConcept C99498987 @default.
• W1853430445 hasConceptScore W1853430445C100460472 @default.
• W1853430445 hasConceptScore W1853430445C115961682 @default.
• W1853430445 hasConceptScore W1853430445C117551214 @default.
• W1853430445 hasConceptScore W1853430445C119599485 @default.
• W1853430445 hasConceptScore W1853430445C121332964 @default.
• W1853430445 hasConceptScore W1853430445C127413603 @default.
• W1853430445 hasConceptScore W1853430445C154945302 @default.
• W1853430445 hasConceptScore W1853430445C163258240 @default.
• W1853430445 hasConceptScore W1853430445C165801399 @default.
• W1853430445 hasConceptScore W1853430445C171250308 @default.
• W1853430445 hasConceptScore W1853430445C192562407 @default.
• W1853430445 hasConceptScore W1853430445C206755178 @default.
• W1853430445 hasConceptScore W1853430445C21200559 @default.
• W1853430445 hasConceptScore W1853430445C24326235 @default.
• W1853430445 hasConceptScore W1853430445C2779227376 @default.
• W1853430445 hasConceptScore W1853430445C2984118289 @default.
• W1853430445 hasConceptScore W1853430445C41008148 @default.
• W1853430445 hasConceptScore W1853430445C46362747 @default.
• W1853430445 hasConceptScore W1853430445C49040817 @default.
• W1853430445 hasConceptScore W1853430445C52192207 @default.
• W1853430445 hasConceptScore W1853430445C53143962 @default.
• W1853430445 hasConceptScore W1853430445C544956773 @default.
• W1853430445 hasConceptScore W1853430445C62520636 @default.
• W1853430445 hasConceptScore W1853430445C89805583 @default.
• W1853430445 hasConceptScore W1853430445C99498987 @default.
• W1853430445 hasLocation W18534304451 @default.
• W1853430445 hasOpenAccess W1853430445 @default.
• W1853430445 hasPrimaryLocation W18534304451 @default.
• W1853430445 hasRelatedWork W1507052825 @default.
• W1853430445 hasRelatedWork W1516456390 @default.
• W1853430445 hasRelatedWork W2003469080 @default.
• W1853430445 hasRelatedWork W2031424373 @default.
• W1853430445 hasRelatedWork W2052578524 @default.
• W1853430445 hasRelatedWork W2096635811 @default.
• W1853430445 hasRelatedWork W2101214719 @default.
• W1853430445 hasRelatedWork W2103198996 @default.
• W1853430445 hasRelatedWork W2105263975 @default.
• W1853430445 hasRelatedWork W2105662158 @default.
• W1853430445 hasRelatedWork W2114766284 @default.
• W1853430445 hasRelatedWork W2117606422 @default.
• W1853430445 hasRelatedWork W2117862798 @default.
• W1853430445 hasRelatedWork W2126502502 @default.
• W1853430445 hasRelatedWork W2132351550 @default.
• W1853430445 hasRelatedWork W2136268807 @default.
• W1853430445 hasRelatedWork W2149128480 @default.
• W1853430445 hasRelatedWork W2152588671 @default.
• W1853430445 hasRelatedWork W2152788544 @default.

• next