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- W1856461572 abstract "The growth kinetics of SiO/sub 2/ films on silicon is developed. A simple model of oxidation takes into account the reactions occurring in bulk and at the two interfaces of the oxide layer as well as the diffusion process for atomic oxygen and diffusion approximation for calculation of the coefficients of kinetic reactions. The relationship is shown to be in excellent agreement with oxidation data obtained over a range of temperature (800/spl deg/-1200/spl deg/C), and oxide thickness (6-400 /spl Aring/) for O/sub 2/ and N/sub 2/O ambient oxidation." @default.
- W1856461572 created "2016-06-24" @default.
- W1856461572 creator A5004915078 @default.
- W1856461572 date "2002-11-23" @default.
- W1856461572 modified "2023-09-25" @default.
- W1856461572 title "New theory of the thermal oxidation of silicon" @default.
- W1856461572 cites W2045531716 @default.
- W1856461572 cites W2053039815 @default.
- W1856461572 cites W2093914900 @default.
- W1856461572 cites W2470227451 @default.
- W1856461572 doi "https://doi.org/10.1109/hkedm.1997.642334" @default.
- W1856461572 hasPublicationYear "2002" @default.
- W1856461572 type Work @default.
- W1856461572 sameAs 1856461572 @default.
- W1856461572 citedByCount "0" @default.
- W1856461572 crossrefType "proceedings-article" @default.
- W1856461572 hasAuthorship W1856461572A5004915078 @default.
- W1856461572 hasConcept C113196181 @default.
- W1856461572 hasConcept C121332964 @default.
- W1856461572 hasConcept C127413603 @default.
- W1856461572 hasConcept C135889238 @default.
- W1856461572 hasConcept C147789679 @default.
- W1856461572 hasConcept C148898269 @default.
- W1856461572 hasConcept C171250308 @default.
- W1856461572 hasConcept C178790620 @default.
- W1856461572 hasConcept C185592680 @default.
- W1856461572 hasConcept C191897082 @default.
- W1856461572 hasConcept C192562407 @default.
- W1856461572 hasConcept C204530211 @default.
- W1856461572 hasConcept C2779227376 @default.
- W1856461572 hasConcept C2779281663 @default.
- W1856461572 hasConcept C2779851234 @default.
- W1856461572 hasConcept C2993759403 @default.
- W1856461572 hasConcept C39353612 @default.
- W1856461572 hasConcept C42360764 @default.
- W1856461572 hasConcept C43617362 @default.
- W1856461572 hasConcept C49040817 @default.
- W1856461572 hasConcept C540031477 @default.
- W1856461572 hasConcept C544956773 @default.
- W1856461572 hasConcept C62520636 @default.
- W1856461572 hasConcept C69357855 @default.
- W1856461572 hasConcept C97355855 @default.
- W1856461572 hasConceptScore W1856461572C113196181 @default.
- W1856461572 hasConceptScore W1856461572C121332964 @default.
- W1856461572 hasConceptScore W1856461572C127413603 @default.
- W1856461572 hasConceptScore W1856461572C135889238 @default.
- W1856461572 hasConceptScore W1856461572C147789679 @default.
- W1856461572 hasConceptScore W1856461572C148898269 @default.
- W1856461572 hasConceptScore W1856461572C171250308 @default.
- W1856461572 hasConceptScore W1856461572C178790620 @default.
- W1856461572 hasConceptScore W1856461572C185592680 @default.
- W1856461572 hasConceptScore W1856461572C191897082 @default.
- W1856461572 hasConceptScore W1856461572C192562407 @default.
- W1856461572 hasConceptScore W1856461572C204530211 @default.
- W1856461572 hasConceptScore W1856461572C2779227376 @default.
- W1856461572 hasConceptScore W1856461572C2779281663 @default.
- W1856461572 hasConceptScore W1856461572C2779851234 @default.
- W1856461572 hasConceptScore W1856461572C2993759403 @default.
- W1856461572 hasConceptScore W1856461572C39353612 @default.
- W1856461572 hasConceptScore W1856461572C42360764 @default.
- W1856461572 hasConceptScore W1856461572C43617362 @default.
- W1856461572 hasConceptScore W1856461572C49040817 @default.
- W1856461572 hasConceptScore W1856461572C540031477 @default.
- W1856461572 hasConceptScore W1856461572C544956773 @default.
- W1856461572 hasConceptScore W1856461572C62520636 @default.
- W1856461572 hasConceptScore W1856461572C69357855 @default.
- W1856461572 hasConceptScore W1856461572C97355855 @default.
- W1856461572 hasLocation W18564615721 @default.
- W1856461572 hasOpenAccess W1856461572 @default.
- W1856461572 hasPrimaryLocation W18564615721 @default.
- W1856461572 hasRelatedWork W1994951474 @default.
- W1856461572 hasRelatedWork W2003494393 @default.
- W1856461572 hasRelatedWork W2021916060 @default.
- W1856461572 hasRelatedWork W2027314290 @default.
- W1856461572 hasRelatedWork W2038188425 @default.
- W1856461572 hasRelatedWork W2038830505 @default.
- W1856461572 hasRelatedWork W2060864961 @default.
- W1856461572 hasRelatedWork W2065726915 @default.
- W1856461572 hasRelatedWork W2075634586 @default.
- W1856461572 hasRelatedWork W2080248507 @default.
- W1856461572 hasRelatedWork W2082750547 @default.
- W1856461572 hasRelatedWork W2091585576 @default.
- W1856461572 hasRelatedWork W2347121175 @default.
- W1856461572 hasRelatedWork W244696829 @default.
- W1856461572 hasRelatedWork W2507945198 @default.
- W1856461572 hasRelatedWork W2586316083 @default.
- W1856461572 hasRelatedWork W3047195174 @default.
- W1856461572 hasRelatedWork W307037948 @default.
- W1856461572 hasRelatedWork W3041744319 @default.
- W1856461572 hasRelatedWork W3149652573 @default.
- W1856461572 isParatext "false" @default.
- W1856461572 isRetracted "false" @default.
- W1856461572 magId "1856461572" @default.
- W1856461572 workType "article" @default.