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- W1857789435 abstract "The US Department of Energy (DOE) and the Semiconductor Research Corporation (SRC) have recently initiated a five-year program, which combines the semiconductor expertise of the SRC with the DOE National Laboratory capabilities in high performance computing, to provide more predictive, advanced technology, modeling and simulation tools for the semiconductor industry. The need for these tools and five initial project thrust areas are described: topography, bulk processes, grids and computational science, interconnects, and devices." @default.
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- W1857789435 date "2002-11-19" @default.
- W1857789435 modified "2023-09-27" @default.
- W1857789435 title "Contributions from the DOE center for semiconductor modeling and simulation" @default.
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- W1857789435 doi "https://doi.org/10.1109/ugim.1995.514140" @default.
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