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- W1867980795 abstract "This paper describes selective area PZT-preparation based on PZT precursor etching for sol-gel method, and its application to the fabrication of PZT disk transducers of nearly 1 /spl mu/m thickness without repeating any process. Using this method, we show that PZT disk transducers of 0.8 /spl mu/m thickness can be fabricated only by a single process. The piezoelectricity of the transducers is discussed by an ultrasonic pulse echo method." @default.
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- W1867980795 date "2003-01-22" @default.
- W1867980795 modified "2023-10-17" @default.
- W1867980795 title "Selective area PZT-preparation by sol-gel method" @default.
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- W1867980795 doi "https://doi.org/10.1109/ultsym.1999.849159" @default.
- W1867980795 hasPublicationYear "2003" @default.
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